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Graphene film transfer method

A graphene film and transfer method technology, applied in chemical instruments and methods, gaseous chemical plating, inorganic chemistry, etc., can solve the problems of graphene film transfer, target substrate attachment, finished film wrinkles, etc., and achieve process simplification , easy to operate, light transmittance and uniform effect

Active Publication Date: 2014-07-23
WUXI GRAPHENE FILM +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the above-mentioned first method, since the metal substrate cannot be well attached to the target substrate, problems such as wrinkles, unevenness, damage, etc. occur in the finished film; the above-mentioned second method cannot transfer the graphene The film is transferred to the substrate evenly, and it is prone to defects such as cracking

Method used

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  • Graphene film transfer method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Embodiment 1 takes PET as the target substrate

[0025] The specific preparation method is as follows:

[0026] (1) Use 200mm*300mm*18um copper foil to grow a complete graphene film in a CVD furnace.

[0027] (2) Lay the copper foil with graphene film grown above and the process transfer film (thickness 0.125mm, PET with hot-peeling adhesive) together through a film-coated roller press. The process parameters of the film-coated roller press are: The pressure is 0.5MPa, the temperature is 70°C, and the speed is 10mm / s.

[0028] (3) Put the process-transferred PET of the above-mentioned bonding copper foil in a mixed solution of hydrochloric acid and hydrogen peroxide, etch the copper foil to obtain a semi-finished product of process-transferred PET / heat-peeling adhesive / graphene film;

[0029] (4) Clean the graphene film on the semi-finished product with pure water, and dry it with an air knife.

[0030] (5) Lay the graphene film surface of the semi-finished product a...

Embodiment 2

[0038] Example 2 takes tempered glass printed with an ink frame as the target substrate

[0039] (1) Use 200mm*300mm*18um copper foil to grow a complete graphene film in a CVD furnace.

[0040] (2) Lay the copper foil with graphene film grown above and the process transfer film (thickness 0.125mm, PET with hot-peeling adhesive) together through a film-coated roller press. The process parameters of the film-coated roller press are: The pressure is 0.5MPa, the temperature is 70°C, and the speed is 10mm / s.

[0041] (3) Put the process-transferred PET of the above-mentioned bonding copper foil in the ammonium persulfate solution, etch the copper foil to obtain a semi-finished product of process-transferred PET / thermal peel adhesive / graphene film;

[0042] (4) Clean the graphene film on the semi-finished product with pure water, and dry it with an air knife.

[0043] (5) Lay the graphene film surface of the semi-finished product above and the tempered glass printed with ink frame...

Embodiment 3

[0051] Embodiment 3 takes PMMA as the target substrate

[0052] (1) Use 200mm*300mm*18um copper foil to grow a complete graphene film in a CVD furnace.

[0053] (2) The copper foil with graphene film grown in step (1) and the process transfer film (thickness 0.125mm, PET with hot-peeling adhesive) are bonded together by a lamination roller press, and the lamination roller press The process parameters are: pressure 0.5MPa, temperature 70°C, speed 10mm / s.

[0054] (3) Place the above-mentioned process transfer film laminated with copper foil in ferric chloride solution, etch the copper foil to obtain a semi-finished product of process transfer PET / thermal peel adhesive / graphene film;

[0055] (4) Clean the graphene film on the semi-finished product with pure water, and dry it with an air knife.

[0056] (5) Lay the graphene film surface of the semi-finished product above and the 0.5mm PMMA as the target substrate (the surface of the PMMA is a non-smooth plane, roughness Rpv<1m...

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Abstract

The invention discloses a graphene film transfer method. The method comprises the following steps: neatly adhering a metal substrate, on which a graphene film is deposited, with a process-transfer substrate with thermal peeling glue, etching off the metal substrate so as to obtain a semi-finished process transfer substrate / thermal peeling glue / graphene film product; attaching a target substrate on the graphene film surface of the semi-finished product, then carrying out a high-temperature high-pressure treatment on the semi-finished product to evenly adhere the target substrate and the semi-finished product and make the thermal peeling glue lose the viscidity, and peeling off the process-transfer substrate so as to obtain the target substrate / graphene film product. The method can high efficiently, uniformly, and integrally transfer a graphene film to a target substrate, can applied to graphene film transferring of substrates with a smooth surface, steps ( the step height is less than 1 mm), or a rough surface ( the roughness Rpv is less than 1 mm), and has the advantages of simple operation and low cost.

Description

technical field [0001] The invention belongs to the technical field of graphene device preparation, and in particular relates to a method for transferring a graphene film to a target substrate. Background technique [0002] Graphene refers to a two-dimensional (2D) planar material with a honeycomb lattice. At present, the preparation methods of graphene mainly include mechanical exfoliation, chemical exfoliation, epitaxy, solvent exfoliation, and chemical vapor deposition (CVD). Among them, the chemical vapor deposition method is one of the methods for preparing large-scale graphene films. Since graphene grows on the metal substrate, how to transfer the graphene film on the metal substrate to a suitable substrate becomes the key to making graphene devices when using CVD to make large-scale graphene. The existing graphene transfer technologies mainly include the following two types: one is to directly attach the metal substrate on which the graphene film grows to the target...

Claims

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Application Information

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IPC IPC(8): C01B31/04C23C16/56C01B32/194
Inventor 邱玉锐谭化兵杨军王炜李慧峰
Owner WUXI GRAPHENE FILM
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