Dispatching control method for batch processor of reentrant manufacturing system

Abstract

The invention provides a dispatching control method for a batch processor of a reentrant manufacturing system. The dispatching control method comprises a primary dispatching control method based on the pull rule, a subsidiary dispatching control method based on the pull rule under a full-batch circumstance and a subsidiary dispatching control method based on the pull rule under a non-full-batch circumstance. The actual requirement that a product maximum dead time limit exist between different equipment units is considered, continuous full-batch operation of the batch processor serves as the pull requirement, dispatching and lot grouping of workpieces of a previous process and reentrant workpieces are pulled, whether the full-batch requirement of the reentrant workpieces is met within a machining constraint time serves as a judgment condition, and the subsidiary dispatching control method based on the pull rule under the full-batch circumstance or the subsidiary dispatching control method based on the pull rule under the non-full-batch circumstance is called. According to the dispatching control method, good collaborative manufacturing between different equipment units is realized according to the pull rule, and the production dispatching requirement of the reentrant manufacturing system can be met. The dispatching control method is simple in conception, convenient to implement, and beneficial to popularization of reentrant manufacturing industries such as semiconductor chip manufacturing.

Description

Technical field [0001] The invention relates to a scheduling control method of a reentrant manufacturing system, in particular to a scheduling control method of a batch processor in a reentrant manufacturing system. Background technique [0002] A reentrant manufacturing system means that when an unfinished product is conveyed along the production line and processed, it is possible to visit the same equipment group several times, such as a semiconductor chip manufacturing system. A batch processor refers to an equipment unit that can process multiple unfinished products at a time without exceeding the maximum processing capacity of the equipment. For example, in a semiconductor chip manufacturing system, the equipment unit in the furnace tube area is a batch processor. A collection of multiple unfinished products that are actually processed each time is called a batch. Because the processing time of batch processing machines is generally much longer than that of non-batch p...

AI Technical Summary

Problems solved by technology

[0003] At present, in the reentrant manufacturing system, for batch machine scheduling control, the assumptions of the existing scheduling control methods are far from the actual requirements and are too ideal; there is a lack of manufacturing coordination between different equipment units, and the batch machine full-batch operation rules are simple , the utilization efficiency of the bottleneck unit is not high

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