Movable MEMS large turning angle blazed grating light modulator based on double-layer comb drive
A blazed grating and optical modulator technology, applied in the field of MEMS optical modulators, can solve the problems of tuning frequency (low switching speed, limited tuning ability of optical modulators, small rotation angle of grating bars, etc.) Reliable performance and large rotation angle
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0024] Preferred embodiments of the present invention will be described in detail below.
[0025] see figure 1 In this embodiment, the silicon substrate 1 of the double-layer comb driven MEMS large-rotation-angle movable blazed grating optical modulator and the insulating layer 2 disposed on the silicon substrate 1, the grating mirror surface 3 is suspended and supported on the insulating layer 2 by torsion beams Above, the torsion beam is composed of movable teeth 4 and pillars 5, electrodes are arranged on the movable teeth 4, one end of the movable teeth 4 is fixed on the insulating layer 2 through the pillars 5, and the other end of the movable teeth 4 is fixed to the grating mirror 3 connection, the movable teeth are two, fixedly connected with the two ends of the grating mirror 3 respectively, the movable teeth 4 and the fixed teeth 6 form a comb driver, wherein the fixed teeth 6 are fixed on the substrate 1, and electrodes are arranged on it , there are two fixed teeth...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com