Two-freedom homodyne grating interferometer displacement measuring system based on optical octave method
A technology of optical multiplier and grating interference, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of inability to eliminate the influence of DC components and amplitude changes, limit the measurement accuracy of the workpiece table, and limit the measurement efficiency and accuracy. Achieve the effect of light weight, convenient application and simple structure
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[0014] The structure, principle and specific implementation of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0015] figure 1 It is a schematic diagram of a two-degree-of-freedom homodyne grating interferometer displacement measurement system based on the optical multiplier method of the present invention. The two-degree-of-freedom heterodyne grating interferometer displacement measurement system includes a grating interferometer 1, a measuring grating 2, and a first preprocessing unit 3a, a second preprocessing unit 3b, an electronic signal processing unit 4, and the measurement grating 2 is a one-dimensional reflective grating.
[0016] figure 2 It is a schematic diagram of the internal structure of a grating interferometer of the present invention. The grating interferometer 2 includes a laser tube 11, a first polarization splitter prism 12, a reference grating 13, a first refraction element 14, a second r...
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