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Large medium/high vacuum gas-bleeding unit and pumping process thereof

An air extraction unit, high vacuum technology, applied in vacuum evaporation plating, metal material coating process, mechanical equipment, etc., can solve the problems affecting the overall performance of the air extraction unit, long start-up time of the diffusion pump, and restrictions on the popularization and application of the unit , to achieve the effect of eliminating oil vapor pollution, saving equipment and improving the quality of vacuum products

Inactive Publication Date: 2014-04-30
储继国
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 2. Diffusion pump uses oil vapor jet to pump air, oil vapor pollution is serious, affecting the quality of vacuum products
[0005] 3. The diffusion pump takes a long time to start (about 60 minutes), the extraction utilization rate is low, and the energy consumption of extraction is further increased
[0014] A variety of new air pumping units composed of traction molecular pumps and chemical adsorption pumps have been proposed, which have obtained quite good pumping capabilities in the medium and high vacuum sections, but in the transition between medium and high vacuum (several Pa~10 -2 Pa) section, the pumping speed is low, which affects the overall performance of the air extraction unit and limits the popularization and application of these units

Method used

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  • Large medium/high vacuum gas-bleeding unit and pumping process thereof
  • Large medium/high vacuum gas-bleeding unit and pumping process thereof
  • Large medium/high vacuum gas-bleeding unit and pumping process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Such as figure 1 As shown, a kind of large-scale medium and high vacuum pumping unit provided by Embodiment 1 of the present invention includes a vacuum chamber 10, and the vacuum chamber 10 is connected with a rough pump 11, a traction molecular pump 12, a cryogenic water vapor pump 13 and A chemical adsorption pump 14 is connected, and the exhaust port of the traction molecular pump 12 is connected with a backing pump 15 . Wherein, a first vacuum valve 16 is provided between the vacuum chamber 10 and the rough pump 11, a second vacuum valve 17 is provided between the vacuum chamber 10 and the traction molecular pump 12, and a second vacuum valve 17 is provided between the vacuum chamber 10 and the cryogenic water vapor pump 13. There is a third vacuum valve 18 , a fourth vacuum valve 19 is provided between the vacuum chamber 10 and the chemical adsorption pump 14 , and a fifth vacuum valve 110 is provided between the exhaust port of the traction molecular pump 12 and ...

Embodiment 2

[0062] Such as figure 2 As shown, Embodiment 2 of the present invention provides an evaporation coating device, which adopts the exhaust unit described in Embodiment 1 to extract air.

[0063] The second embodiment is basically the same as the first embodiment, the difference being that the vacuum chamber 10 in the first embodiment is replaced by the coating chamber 20 . Specifically as follows: the second embodiment of the evaporation coating equipment includes a coating chamber 20, and the coating chamber 20 is connected with a rough pump 21, a traction molecular pump 22, a cryogenic water vapor pump 23 and a chemical adsorption pump 24 respectively, and the traction molecular pump 22 The exhaust port of the exhaust port is connected with a backing pump 25.

[0064] Wherein, a first vacuum valve 26 is provided between the coating chamber 20 and the rough pump 21, a second vacuum valve 27 is provided between the coating chamber 20 and the traction molecular pump 22, and a s...

Embodiment 3

[0097] Such as image 3 As shown, the vacuum furnace provided in the third embodiment of the present invention adopts the exhaust unit described in the first embodiment to extract air.

[0098] The structure of the third embodiment is similar to that of the second embodiment, including a roughing pump 31, a traction molecular pump 32, a cryogenic water vapor pump 33, a chemical adsorption pump 34, a backing pump 35, a first vacuum valve 36, and a second vacuum valve 37 , the third vacuum valve 38, the fourth vacuum valve 39 and the fifth vacuum valve 310, the difference is that the coating chamber 20 in the second embodiment is replaced by the vacuum furnace cavity 30; The clean high vacuum pump (such as traction molecular pump) 312 is connected, and the exhaust port of the small clean high vacuum pump 312 is connected with the small rough pump 314 through the seventh vacuum valve 313, forming a regeneration device dedicated to the cryogenic water vapor pump 33.

[0099] The ...

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Abstract

The invention provides a large medium / high vacuum gas-bleeding unit and a gas-bleeding process of the large medium / high vacuum gas-bleeding unit. The mode that a cryogenic water vapor pump, a traction molecular pump and a chemical adsorption pump unit are connected in parallel for gas bleeding replaces a traditional mode that a diffusion pump and a Roots pump unit are connected in series for gas bleeding. The traction molecular pump is used for gas bleeding and removing gas with pressure ranging from several Pa to hundreds of Pa. The cryogenic water vapor pump is connected with the traction molecular pump in parallel for gas bleeding and removing gas with pressure ranging from several Pa to 10<-2> Pa. The traction molecular pump, the cryogenic water vapor pump and the chemical adsorption pump unit are connected in parallel for gas bleeding and removing gas with pressure smaller than or equal to 10<-2> Pa. In this way, the gas-bleeding capacity of medium / high vacuum transition sections is improved, gas-bleeding energy consumption and operating cost are reduced, oil vapor pollution is eliminated, and the quality of vacuum products is improved.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a large-scale medium and high vacuum exhaust unit and an exhaust process thereof. Background technique [0002] Traditional large-scale medium and high vacuum pumping units use diffusion pump + Roots pump + rough pump unit (diffusion pump unit for short) to pump air, which has the following disadvantages: [0003] 1. High energy consumption. Diffusion pumps and Roots pumps are high energy consumption pumps. A diffusion pump unit with an effective pumping speed of 10,000 L / s has a nominal energy consumption of more than 40kW and an annual power consumption of more than 300,000 kWh. [0004] 2. Diffusion pumps use oil vapor jets to pump air, and oil vapor pollution is serious, which affects the quality of vacuum products. [0005] 3. The start-up time of the diffusion pump is long (about 60 minutes), the extraction utilization rate is low, and the energy consu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B41/06F04B37/14C23C14/56
Inventor 储继国
Owner 储继国
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