Vacuum evaporation equipment for inorganic material

Abstract

The invention provides vacuum evaporation equipment for inorganic material, which comprises a vacuum evaporation chamber and an automatic control system. In the vacuum evaporation equipment provided by the invention, each module collects various parameter signals in the vacuum evaporation chamber and sends various parameter signals to a main control machine; the main control machine processes the various received parameter signals according to various preset parameters to obtain feedback signals and feeds back the feedback signals to corresponding control modules; the corresponding control modules carry out automatic regulation and control on corresponding parts according to the corresponding feedback signals so as to achieve automatic control on inorganic material vacuum coating. The vacuum evaporation equipment for the inorganic material not only saves a great quantity of labor, but also, more importantly, can achieve effective monitoring on the inorganic material vacuum evaporation process and achieves improvement on the inorganic material vacuum evaporation accuracy and quality, and speed increasing.

Description

technical field [0001] The invention belongs to the technical field of vacuum evaporation, in particular to a vacuum evaporation equipment for inorganic materials. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and industry. Through the continuous efforts of scientific researchers, the related technologies of organic optoelectronic devices have been greatly developed, and the organic optoelectronic device industry is rapidly forming and constantly maturing and growing. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. The good news is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concept of material synthesis and device design is b...

AI Technical Summary

Problems solved by technology

At present, domestic vacuum evaporation equipment for inorganic materials lacks effective monitoring and automatic control of the vacuum evaporation process of inorganic materials. Low, serious loss; at the same time, due to the inability to automatically control the vacuum evaporation process of inorganic materials, there are great differences in the performance of different batches of devices

In addition, due to the lack of precise docking and transmission technology, the vacuum evaporation process of inorganic materials is very slow and cannot achieve mass production, and cannot meet the growing needs of industrialization

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