Inorganic material vacuum evaporation equipment
An inorganic material and evaporation technology, which is applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve the problems that cannot meet the needs of industrialization, cannot be automatically controlled, and the performance of devices is different.
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[0039] The invention provides a vacuum evaporation equipment for inorganic materials, including a vacuum evaporation chamber and an automatic control system;
[0040] Wherein, the vacuum evaporation chamber includes:
[0041] cavity;
[0042] Vacuuming equipment communicated with the cavity;
[0043] A resistance heating beam source furnace arranged in the cavity for heating the evaporation source, a first baffle is arranged above the resistance heating beam source furnace;
[0044] a substrate platform corresponding to the resistance heating beam source furnace, and a second baffle is arranged on the substrate platform;
[0045] a mask storage bin arranged in the cavity;
[0046] A reticle docking system connected to the reticle storage bin for transporting the reticle and docking or separating the reticle from the substrate;
[0047] a mechanical transfer system communicating with the chamber for transferring substrates and connecting or separating the substrates from th...
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