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Inorganic material vacuum evaporation equipment

An inorganic material and evaporation technology, which is applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve the problems that cannot meet the needs of industrialization, cannot be automatically controlled, and the performance of devices is different.

Active Publication Date: 2015-12-09
CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, domestic vacuum evaporation equipment for inorganic materials lacks effective monitoring and automatic control of the vacuum evaporation process of inorganic materials. Low, serious loss; at the same time, due to the inability to automatically control the vacuum evaporation process of inorganic materials, there are great differences in the performance of different batches of devices
In addition, due to the lack of precise docking and transmission technology, the vacuum evaporation process of inorganic materials is very slow and cannot achieve mass production, and cannot meet the growing needs of industrialization

Method used

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  • Inorganic material vacuum evaporation equipment
  • Inorganic material vacuum evaporation equipment

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Embodiment Construction

[0039] The invention provides a vacuum evaporation equipment for inorganic materials, including a vacuum evaporation chamber and an automatic control system;

[0040] Wherein, the vacuum evaporation chamber includes:

[0041] cavity;

[0042] Vacuuming equipment communicated with the cavity;

[0043] A resistance heating beam source furnace arranged in the cavity for heating the evaporation source, a first baffle is arranged above the resistance heating beam source furnace;

[0044] a substrate platform corresponding to the resistance heating beam source furnace, and a second baffle is arranged on the substrate platform;

[0045] a mask storage bin arranged in the cavity;

[0046] A reticle docking system connected to the reticle storage bin for transporting the reticle and docking or separating the reticle from the substrate;

[0047] a mechanical transfer system communicating with the chamber for transferring substrates and connecting or separating the substrates from th...

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Abstract

The invention provides vacuum evaporation equipment for inorganic material, which comprises a vacuum evaporation chamber and an automatic control system. In the vacuum evaporation equipment provided by the invention, each module collects various parameter signals in the vacuum evaporation chamber and sends various parameter signals to a main control machine; the main control machine processes the various received parameter signals according to various preset parameters to obtain feedback signals and feeds back the feedback signals to corresponding control modules; the corresponding control modules carry out automatic regulation and control on corresponding parts according to the corresponding feedback signals so as to achieve automatic control on inorganic material vacuum coating. The vacuum evaporation equipment for the inorganic material not only saves a great quantity of labor, but also, more importantly, can achieve effective monitoring on the inorganic material vacuum evaporation process and achieves improvement on the inorganic material vacuum evaporation accuracy and quality, and speed increasing.

Description

technical field [0001] The invention belongs to the technical field of vacuum evaporation, in particular to a vacuum evaporation equipment for inorganic materials. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and industry. Through the continuous efforts of scientific researchers, the related technologies of organic optoelectronic devices have been greatly developed, and the organic optoelectronic device industry is rapidly forming and constantly maturing and growing. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. The good news is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concept of material synthesis and device design is b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/54C23C14/04C23C14/24
Inventor 张洪杰周亮李成宇邓瑞平
Owner CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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