Self-protected microwave equalizer based on mems structure

Abstract

The invention discloses a self-protecting microwave equilizer based on an MEMS (Micro Electro Mechanical System) structure. The self-protecting microwave equilizer comprises a substrate, a coplanar waveguide transmission line arranged on the substrate, a cantilever beam anchor region, a cantilever beam, a first absorbing resistor, a second absorbing resistor, a first transmission line branch knot and a second transmission line branch knot, wherein the coplanar waveguide transmission line consists of a coplanar waveguide signal wire as well as a first coplanar waveguide ground wire and a second coplanar waveguide ground wire which are symmetrical about the coplanar waveguide signal wire; the cantilever beam anchor region is arranged on the coplanar waveguide ground wire; one end of the cantilever beam is arranged on the cantilever beam anchor region, and the other end of the cantilever beam is suspended above the coplanar waveguide signal wire; the first absorbing resistor and the second absorbing resistor are placed in positions with a distance of quarter wavelength; one end of the first absorbing resistor is connected with the coplanar waveguide signal wire. The self-protecting microwave equilizer disclosed by the invention achieves a self-protecting function, the reliability of the whole device is improved, the service life is effectively prolonged and the application prospect of the device is greatly expanded.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and relates to a structure for adjusting microwave signal power transmitted on a coplanar waveguide transmission line. Background technique [0002] Microwave equalizers are widely used in microwave power amplifier circuits of radar or communication systems. It can adjust the microwave power level so that the power of the microwave signal remains consistent throughout the operating frequency, which is suitable for the amplification and output of the next-stage amplifier, improving Performance of the entire microwave power module. However, with the increasing operating frequency and decreasing size of microwave power modules in modern applications, there are developmental requirements for microwave equalizers with small size, low insertion loss, and high frequency. In order to improve the performance of the microwave equalizer, two or more microwave stub structures are proposed; i...

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Problems solved by technology

Although these microwave equalizer structures can improve the performance of the device in a targeted manner, they all lack self-protection mechanisms, so once the power level of the microwave signal exceeds a certain limit, the entire device will be burned

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