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A Rotary Vacuum Diffusion Pump

A vacuum diffusion and rotary technology, which is applied in the direction of diffusion pumps, non-volume pumps, pumps, etc., can solve the problems that the ultimate vacuum degree cannot be further improved, the pumping speed is restricted, and it is difficult to increase it, so as to increase the length, Improve the pumping speed and speed up the effect of collision movement

Inactive Publication Date: 2016-08-17
JIANGSU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a new type of vacuum diffusion pump. By optimizing and upgrading the structure of the traditional pumping model, the ultimate vacuum degree of the traditional diffusion pump can not be solved due to the limitation of the spray speed of the high-temperature steam flow and the length of the jet flow. Further improvement, the pumping speed is limited by the traditional pumping model and it is difficult to increase, etc.

Method used

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  • A Rotary Vacuum Diffusion Pump
  • A Rotary Vacuum Diffusion Pump
  • A Rotary Vacuum Diffusion Pump

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Embodiment Construction

[0022] A vacuum diffusion pump of the present invention is such as figure 1 As shown, the basic structure includes: a pump body 1, an air inlet 18 and an air outlet 8, a filter screen 20, a cooling water tank 4, a heating device 6 and a fractionation device 5, an evaporation oil chamber 3 and a multi-stage rotary nozzle. The characteristic structure is: The pump body 1 is in the shape of a spindle; the evaporation oil chamber 3 is in the shape of a cone, on which there are connecting pipes 14 connected to the multi-stage nozzles; the multi-stage rotating nozzles are connected and driven by a planetary gear mechanism and driven by a motor 19; The nozzle is elliptical, and the ratio of the long axis to the short axis of the elliptical nozzle is (10-20): 1.

[0023] The specific implementation is as follows:

[0024] (1) Pump body 1: in the shape of a spindle; two air inlets 18 are symmetrically distributed at the top, and one air outlet 8 is at the bottom; there is a heating d...

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Abstract

The invention relates to the field of vacuum pumps, in particular to a rotation type vacuum diffusion pump. The diffusion pump achieves traction and compression of air with rotation type movement by adopting multiple levels of high-velocity vapor steam with each level containing multiple pieces of slice-shaped high-velocity vapor steam, and therefore the vacuum degree is obtained. In addition, an evaporation oil cavity is in a cone shape, by designing the sizes of different oil cavity branch layers, a high jetting velocity of oil vapor is obtained at a jetting opening, and meanwhile light fractions of the outer layer gains a higher flow velocity than heavy fractions of the inner layer. The rotation velocities of nozzles of different levels form a velocity gradient from top to bottom, and therefore gas is continuously extruded to the bottom layers of a pump body and discharged by a mechanical pump. Transmission between the nozzles is achieved through planetary gear mechanisms and the nozzles are driven by a motor. The rotation velocities of the nozzles form the velocity gradient from top to bottom, the fusiform pump body is adopted, the length of a jet stream is increased, and therefore the ultimate vacuum is better.

Description

technical field [0001] The invention relates to the field of vacuum pumps, in particular to a rotary vacuum diffusion pump. Background technique [0002] The equipment used to obtain vacuum is called vacuum pump, which can be divided into two categories according to the working principle: compression vacuum pump and adsorption vacuum pump. The design, manufacture and application of any vacuum pump are for the purpose of strengthening the pumping effect and suppressing the backflow. of. [0003] The vapor flow diffusion pump belongs to the compression type vacuum pump, which uses the phenomenon of gas diffusion to pump air. The traditional vapor flow diffusion pump realizes multiple compression of the gas through the traction effect of the directional, multi-stage, umbrella-shaped high temperature jet on the gas molecules. Obtain the degree of vacuum; there is a high-speed moving umbrella steam flow in the pump, the gas diffuses into the steam flow and is taken to the air ou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04F9/00
Inventor 陈炜陈泷曹志福欧阳康汤鹏鹏蒋在敏
Owner JIANGSU UNIV
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