Piano-shaped terahertz wave polarizing beam splitter
A polarization beam splitter and polarization beam splitting technology, applied in the direction of instruments, optical components, optics, etc., can solve the problems of high cost, low beam splitting rate, complex structure, etc., and achieve small size, high beam splitting rate, and small volume Effect
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[0014] The material of the first square plate is silicon nitride, the side length of the first square plate is 100 μm, and the height is 30 μm. The material of the second square plate is benzocyclobutene, the side length of the second square plate is 100 μm, and the height is 10 μm. The material of the third square plate is silicon nitride, the side length of the third square plate is 100 μm, and the height is 30 μm. The material of the first right-angled trapezoidal plate is silicon nitride, the length of the upper base of the first right-angled trapezoidal plate is 30 μm, the length of the lower base is 100 μm, the length of the right-angled side is 200 μm, and the height is 30 μm. The material of the second right-angled trapezoidal plate is benzocyclobutene, the length of the upper base of the second right-angled trapezoidal plate is 30 μm, the length of the lower base is 100 μm, the length of the right-angled side is 200 μm, and the height is 10 μm. The length of the rect...
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