Preparation method for nano metal ball bowl array structure

An array structure and nano-metal technology, applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of metal nanostructure preparation limitations, low efficiency, high preparation cost, etc., to achieve low cost, high efficiency, good reproducible effect

Inactive Publication Date: 2014-03-12
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] At present, the method of atomic deposition metal combined with ion beam etching or chemical method is usually used to construct metal nanoarrays, but due to the high preparation cost and low efficiency of these methods, the preparation of large-area metal nanostructures is greatly limited.

Method used

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  • Preparation method for nano metal ball bowl array structure
  • Preparation method for nano metal ball bowl array structure
  • Preparation method for nano metal ball bowl array structure

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Embodiment Construction

[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. The protection scope of the present invention should include all content of the claims. Through the following examples, those skilled in the art can realize all the contents of the claims of the present invention.

[0030] figure 1 It is a process flow chart of the present invention, as shown in the figure, the method for preparing the nano-metal ball bowl array structure of the present invention includes the following steps:

[0031] 1) Perform hydrophilic treatment on the substrate; the substrate is a quartz substrate, and the steps of hydrophilic treatment are: place the substrate in a mixture prepared by concentrated sulfuric acid (98%) and hydrogen peroxide at a mass ratio of 3:1 solution, heated in a water bath at 80°C for 1 hour, then took out the substrate and rinsed it repeatedly with deionized water, and ultrasonically oscillated in...

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Abstract

The invention relates to a preparation method for a nano metal ball bowl array structure. The preparation method comprises the following steps: 1), conducting hydrophilic treatment on a substrate; 2), selecting a nanosphere latex solution, wherein the diameters of nanospheres are uniform and consistent, and self-assembling a single layer of closely-arranged nanosphere array on the substrate subjected to hydrophilic treatment in the step 1) through a spin-coating method or a pulling method; 3), the nanosphere array obtained in the step 2) is coated with a metal film; 4) peeling off the nanosphere array coated with the metal film on the surface in the step 3) by using a viscous material; 5) removing the nanospheres peeled off in the step 4) by using a corrosive organic solvent or a reactive ion etching technique, so as to obtain the nano metal ball bowl array structure. By using the preparation method provided by the invention, the large-area nano metal ball bowl array structure is efficiently prepared, and the nano metal ball bowl array structure has a very wide application prospect in the fields of biosensors, super-hydrophobic materials, nano-microfluidic devices, Raman enhancement and the like.

Description

technical field [0001] The invention belongs to the field of micro-nano structure processing, and in particular relates to a preparation method of a nano-metal ball bowl array structure. Background technique [0002] Nanostructures have broad application prospects in photocatalysis, data storage, biosensors, superhydrophobic materials, and Raman enhancement, so they have attracted more and more attention. Among them, the nano-metal ball-bowl array structure has attracted great interest because of its broad application prospects in biomedicine, nano-microfluidic devices, magnetic enhancement, electromagnetic field enhancement, and electrochemical catalysis. [0003] At present, metal nanoarrays are generally constructed by atomic deposition of metal combined with ion beam etching or chemical methods, but due to the high cost and low efficiency of these methods, the preparation of large-area metal nanostructures is greatly limited. The present invention proposes a method for ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 史立芳张满邓启凌胡松秦燕云曹阿秀夏良平
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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