Reflectivity and transmittance comprehensive measurement method based on pulse laser light source

Abstract

The invention relates to a reflectivity and transmittance comprehensive measurement method based on a pulse laser light source. The method includes the steps that a pulse laser light beam is split into a reference light beam and a detection light beam, the reference light beam is focused on a photoelectric detector for direct detection, and the detection light beam is injected into an optical resonance cavity. When an optical element with reflectivity larger than 99% is measured, a pulsed light cavity ring-down technology is adopted, ring-down time tau 0 of an output signal of the initial optical resonance cavity and ring-down time tau 1 of an output signal of the optical resonance cavity after the optical element to be detected is installed in the optical resonance cavity are measured, and reflectivity R of the optical element to be detected is obtained through calculation. When the value of R is smaller than 99%, a spectrophotometry is used for measuring the reflectivity of the optical element to be detected. An output cavity lens of the optical resonance cavity is moved away, detection light reflected from the optical element to be detected is focused on the photoelectric detector for detection, the light intensity signal ratio of the detection light beam and the reference light beam is recorded, and the reflectivity R of the optical element to be detected is obtained through calibration.

Description

technical field [0001] The invention relates to the technical field for measuring the reflectivity of reflective optical elements and the transmittance of transmissive optical elements, in particular to a method for measuring the reflectivity and transmittance of arbitrary reflectivity optical elements and large-diameter optical elements based on a pulsed laser light source . Background technique [0002] Spectrophotometry is the most common method for measuring the transmission and reflection of optical components. In principle, as long as the reflected light energy flow E is measured r and the incident light can stay E 1 , the reflectivity is E r / E 1 . In actual measurement, the fluctuation of the output power of the laser light source is an important factor affecting the measurement results. For some high-reflectivity optical components with a reflectivity of over 99.9%, the light intensity is very close between the optical component without the optical component t...

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned spectrophotometric device cannot accurately measure the reflectivity of optical elements with a reflectivity higher than 99.9%, and the high reflectivity measurement device based on optical cavity ring-down technology cannot measure the reflectivity of the optical element to be measured because its measurement accuracy is proportional to the reflectivity of the optical element to be measured. Accurately measure the reflectivity of optical components with reflectivity below 98%

At present, there is no report on the device that can realize the accurate measurement of arbitrary reflectivity based on pulsed laser light source

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