An Improved Tail Gas Condensation and Separation Device for Polysilicon Production

Abstract

The present invention designs the field of reduction tail gas recovery in polysilicon production. The existing separation device is composed of a plurality of heat exchangers with different temperatures distributed horizontally, resulting in high energy consumption and insufficient recycling of cooling capacity. Therefore, the present invention A three-dimensional combined separation device is provided, which connects the reduction tail gas liquid collector, circulating water heat exchanger, gas-gas heat exchanger, and Freon heat exchanger from bottom to top, and connects the heat exchangers between each heat exchanger and the top Equipped with a reduced tail gas redistributor and a demister, the whole device is in a tower structure, a reduced tail gas inlet is installed on the side of the reduced tail gas liquid collector, and a separated chlorosilane liquid outlet is installed at the bottom, the invention has energy-saving Consumption, basic construction cost savings, convenient equipment maintenance, high separation effect, and low equipment operating costs.

Description

technical field [0001] The invention belongs to the field of recovery of reduction tail gas in polysilicon production, and in particular relates to a method for condensation and separation of reduction tail gas. Background technique [0002] In the polysilicon production process, the reduction tail gas condensation separation system is to separate the condensable chlorosilane from the non-condensable hydrogen and most of the hydrogen chloride in the reduction tail gas. [0003] The traditional exhaust gas recovery method is as attached figure 1 Shown is that the reduction tail gas is gradually cooled down through the distributed horizontally distributed circulating water heat exchanger, air-gas heat exchanger, frozen brine heat exchanger and Freon heat exchanger to achieve the purpose of separation. This method requires a large amount of cooling capacity to separate the condensable components from the non-condensable components in the tail gas, which requires not only a Fre...

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Problems solved by technology

[0004] The object of the present invention is to solve the above-mentioned high energy consumption problem, and provide a tail gas condensation and separation device in polysilicon production, which uses the cooling capacity and heat in the condensation process to exchange heat with each other, and makes full use of the cooling capacity, so as to achieve better condensation and separation The effect and the purpose of reducing production energy consumption

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