Positioner capable of rotating at multiple angles

Abstract

The invention discloses a positioner capable of rotating at multiple angles, and belongs to the technical field of optical device adjusting devices. The positioner capable of rotating at multiple angles can automatically control the rotation angle of an optical device. The positioner capable of rotating at multiple angles comprises a base, a driving assembly, a bearing, a hollow rotary body, a first connecting rod and a second connecting rod. The positioner capable of rotating at multiple angles is compact in size, large in light flux, accurate in positioning, high in repeatability, and capable of automatically controlling the light-permeable optical device to rotate.

Description

technical field [0001] The invention relates to the technical field of optical device adjustment devices, in particular to a multi-angle rotary positioner capable of automatically controlling the rotation angle of optical devices. Background technique [0002] In the application of optical detection equipment and instruments, it is sometimes necessary to automatically control the optical components in them to rotate to multiple different angles, thereby creating multiple different measurement conditions. For example, when using ellipsometry to measure the film thickness and reflectivity of a wafer, it is necessary to rotate the polarizer to 0°, 45°, 90° and 135° respectively. Such requirements often have strict requirements on the accuracy and repeatability of the rotation angle positioning. [0003] In the prior art, the automatic angle control of optical detection equipment and instruments can be realized by using stepper motors and servo motors as driving components. Fo...

AI Technical Summary

Problems solved by technology

For example, the GCD electronically controlled rotary table series of Daheng New Era Technology Co., Ltd. is driven by a two-phase stepping motor, and can realize the rotary motion of the rotary table with the worm gear drive. The disadvantage of this type of product is that it is bulky and heavy. The worm gear transmission with a large reduction ratio, the turntable speed is low, and the maximum speed is 3RPM

In addition, the DRTM series electric rotary table of OWIS company in Germany is driven by a stepping motor or a servo motor, and is driven by a synchronous belt to realize the rotary positioning of the rotary table. Larger, with obvious heat generation and low positioning accuracy

In addition, in the prior art, there is another method that omits the mechanical transmission link and uses a hollow shaft motor, such as the AH4K series 5-phase hollow shaft stepping motor of Autonics in South Korea, to directly connect the optical element to the hollow shaft to realize the positioning of the optical device. The disadvantage of this type of technology is that it is difficult to achieve a large amount of light transmission. The maximum light transmission amount of the AH4K series 5-phase hollow shaft stepper motor is a circle with a diameter of 9mm. The motor used in this type of technology is special and expensive. If you want to Increasing the clear aperture can only increase the size of the motor and increase the power of the motor, while the load is only an optical device with a small mass. This technology feels like a "big cow pulling a small cart", which is a waste of energy

To sum up, the rotary positioning platform in the prior art has a large volume and mass, some technologies have a small amount of light transmission and are expensive, and some technologies have low repetitive positioning and large heat generation and vibration, which is not conducive to the system integration of optical instruments

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