Light-blocking type micro-electro-mechanical variable optical attenuator

A variable optical and micro-electromechanical technology, applied in the coupling direction of optical waveguide, can solve the problems of large driving voltage and poor linearity, and achieve the effect of large attenuation range, good dynamic characteristics and large driving force

Active Publication Date: 2015-06-10
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still some technical problems in the existing MEMS VOA: such as large driving voltage, poor linearity, reliability, etc., there is still a certain distance from practical application

Method used

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  • Light-blocking type micro-electro-mechanical variable optical attenuator
  • Light-blocking type micro-electro-mechanical variable optical attenuator
  • Light-blocking type micro-electro-mechanical variable optical attenuator

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Embodiment Construction

[0016] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0017] figure 1 A schematic structural diagram of the light-shielding micro-electromechanical variable optical attenuator disclosed in the present invention is shown. Such as figure 1 As shown, the variable optical attenuator includes an input optical fiber 1 , an output optical fiber 10 , a fixed shading plate 3 , a drive circuit 4 , a movable MEMS device 6 , a magnetic field generating device 8 , and a movable shading plate 9 . Wherein, the fixed light-shielding plate 3 and the movable MEMS device 6 are respectively manufactured by using micro-electro-mechanical technology on different substrates. The fixed shading plate 3 can be made of silicon chips, glass sheets or other materials, and the surface is coated with a ...

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Abstract

The invention discloses a light-blocking type micro-machine electrical variable optical attenuator which comprises input optical fibers, output optical fibers, a fixing light-shielding board, a movable MEMS appliance, a magnetic field generating device and a drive circuit. A light-permeable hole is formed in the center of the fixing light-shielding board, the drive circuit and the lower surface of the fixing light-shielding board can be bonded with the upper surface of the movable MEMS appliance in an aligned mode, a movable light-shielding board is arranged in the center of the movable MEMS appliance, the magnetic field generating device is of a central hollowing structure, and the center of the movable MEMS appliance, the center of the movable MEMS appliance, the center of the magnetic field generating device and the center of the light-permeable hole are arranged in the same axis. Light is input through the input optical fibers, passes through the light-permeable hole of the fixing light-shielding board, generates controllable light attenuation through the movable MEMS appliance, and is output by the output optical fibers. The magnetic field generating device interacts with currents passing through the movable MEMS appliance, so that lorentz force is generated, and the movable light-shielding board is driven to move. The amount of light attenuation of the light-blocking type micro-machine electrical variable optical attenuator is continuous and adjustable.

Description

technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a variable optical attenuator, which can be used to produce controllable attenuation of the light intensity input therein. Background technique [0002] With the rapid growth of communication traffic and the diversification of business forms, all-optical networks have become the development trend of communication networks. One of the key problems to be solved in the practical application of optical networks is the unbalanced power among wavelength channels. In many cases, it is necessary to reduce the power of optical signals. [0003] Optical Attenuator (OA) is a kind of optical attenuator (mechanical, electric, magnetic, etc.) that can realize the movement of optical elements or the change of optical state, thereby changing the transmission efficiency of light, and achieving the output optical power relative to A device that attenuates the input optical power. As an i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/26
Inventor 毛旭吕兴东魏伟伟杨晋玲杨富华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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