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Optical system wavefront measurement device and method based on circular carrier frequency phase demodulation method

An optical system and phase demodulation technology, which is applied in the field of optical interferometry, can solve the problems that cannot meet the requirements of transient measurement, cannot avoid the influence of phase shift error, and cumbersome experimental operations, so as to meet the requirements of transient measurement and avoid shift The effect of phase error and simple experimental operation

Active Publication Date: 2014-02-05
NANJING UNIV OF SCI & TECH
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Problems solved by technology

[0004] To sum up, the current wavefront detection system has the disadvantages of complex detection system and cumbersome experimental operation, and cannot meet the requirements of transient measurement, and cannot avoid the influence of phase shift error and environmental vibration on measurement.

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  • Optical system wavefront measurement device and method based on circular carrier frequency phase demodulation method
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  • Optical system wavefront measurement device and method based on circular carrier frequency phase demodulation method

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Embodiment 1

[0065] The present invention is an optical system wavefront measurement device based on circular carrier frequency phase demodulation method. The light source is a helium-neon laser 1 with a central wavelength of 632.8nm; the spatial filter 3 uses a small hole of 10 μm to ensure that it is incident on the surface of the optical system 4 to be measured. wavefront quality; the optical system 4 to be tested is a doublet lens with a focal length of 125 mm, an F number of 6, and a numerical aperture of the outgoing light of 0.1; the point diffraction plate 5 is installed on a precision guide rail to realize the axial movement of the point diffraction plate , The diameter of the small hole of the point diffraction plate 5 is 6.3μm, and the minimum graduation value of the precision guide rail is 0.1mm.

[0066] Based on the optical system wavefront measurement method of the above device, the point diffraction plate 5 is used to generate an interferogram containing a circular carrier f...

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Abstract

The invention discloses an optical system wavefront measurement device and method based on a circular carrier frequency phase demodulation method. The device comprises a laser, a beam expander, a spatial filter, an optical system to be measured, a point diffraction plate and a CCD camera, wherein the laser, the beam expander, the spatial filter, the optical system to be measured, the point diffraction plate and the CCD camera are sequentially coaxially arranged in the direction of an optical path; the spatial filter is arranged on the focus of the beam expander; the point diffraction plate is arranged on an emergent wave surface rendezvous point of the optical system to be measured; the point diffraction plate comprises a pin hole and a pin hole peripheral part, and the pin hole peripheral part is plated with a high-reflection film layer. The measurement method includes the steps that before an ideal wave surface generated by the point diffraction plate through the pin hole diffraction effect is used as a reference wave, the point diffraction plate moves in the direction of the optical axle to form a circular carrier frequency interferogram, and a four-phase splice method is utilized to directly solve original phases in the circular carrier frequency interferogram, namely the wavefront of the optical system to be measured. According to the method, the emergent wavefront of the optical system can be measured by few components, and the measurement device is easy to operate, high in accuracy and capable of meeting the requirement of transient measurement.

Description

technical field [0001] The invention belongs to the field of optical interferometry, in particular to an optical system wavefront measurement device and method based on a circular carrier frequency phase demodulation method. Background technique [0002] A high-quality laser wavefront is the prerequisite for the realization of high-end technologies such as inter-satellite laser communication, inertial confinement nuclear fusion, and chirped pulse amplification technology. Compared with traditional radio frequency satellite communication technology, inter-satellite laser communication technology has many advantages and great development potential; inertial confinement nuclear fusion is the mainstream technology to solve the problem of modern energy shortage; the pulse obtained by using chirped pulse amplification technology, peak power It can reach the order of hundreds of terawatts. Such a high-power laser can be applied to many research fields. These three technologies all...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
Inventor 陈磊解晓龙张城谷晨风李金鹏李博方波
Owner NANJING UNIV OF SCI & TECH
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