Optical system wavefront measurement device and method based on circular carrier frequency phase demodulation method
An optical system and phase demodulation technology, which is applied in the field of optical interferometry, can solve the problems that cannot meet the requirements of transient measurement, cannot avoid the influence of phase shift error, and cumbersome experimental operations, so as to meet the requirements of transient measurement and avoid shift The effect of phase error and simple experimental operation
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[0065] The present invention is an optical system wavefront measurement device based on circular carrier frequency phase demodulation method. The light source is a helium-neon laser 1 with a central wavelength of 632.8nm; the spatial filter 3 uses a small hole of 10 μm to ensure that it is incident on the surface of the optical system 4 to be measured. wavefront quality; the optical system 4 to be tested is a doublet lens with a focal length of 125 mm, an F number of 6, and a numerical aperture of the outgoing light of 0.1; the point diffraction plate 5 is installed on a precision guide rail to realize the axial movement of the point diffraction plate , The diameter of the small hole of the point diffraction plate 5 is 6.3μm, and the minimum graduation value of the precision guide rail is 0.1mm.
[0066] Based on the optical system wavefront measurement method of the above device, the point diffraction plate 5 is used to generate an interferogram containing a circular carrier f...
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