Three-dimensional planar magnetic sensor

Abstract

A three-dimensional planar magnetic sensor comprises a first magnetic sensor, a second magnetic sensor, a third magnetic sensor and a circuit. The first magnetic sensor, the second magnetic sensor and the third magnetic sensor are arrange on the same plane and respectively measure component of a magnetic field in the first, second and third directions, and the third direction is perpendicular to the first direction and the second direction. The third magnetic sensor comprises a third fixed layer, a third magnetic insulation layer and a third free layer, wherein the magnetization direction of the third fixed layer is the third direction or the reverse direction, the spontaneous magnetization of the third free layer is the first direction and the second direction or inclines to the third direction by 0-180 degrees, the magnetic resistance value is an intermediate value in the spontaneous magnetization direction and changes along with the magnetic field. The three-dimensional planar magnetic sensor is manufactured by the semiconductor processing technology without vertical binding, output and durability are improved, and cost and time are saved.

Description

Technical field [0001] The invention relates to a three-dimensional planar magnetic sensor, which is mainly capable of arranging sensors for measuring X, Y, and Z directions on the same plane using a semiconductor manufacturing process. Background technique [0002] With the development of science and technology, the demand for electronic maps and navigation has increased significantly. Therefore, the demand for magnetic sensors has also increased. With the characteristics of magnetic induction, it can be quickly applied in navigation and global positioning systems. As electronic products develop, The thin and short design not only reduces the overall product volume, but also puts the design of the magnetic sensor to the test. [0003] The current setup of magnetic sensors usually uses three magnetic sensors with the same structure. They are arranged in the vertical direction of the same plane to measure the X-axis component and Y-axis component of the magnetic field. The o...

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Problems solved by technology

[0003] The current setting of magnetic sensors usually has three magnetic sensors with the same structure, and the two are arranged in the vertical direction of the same plane to measure the X-axis component and the Y-axis component of the magnetic field, and to measure The other magnetic sensor of the Z-axis component of the magnetic field needs to be installed perpendicular to the other two. As the size of the current integrated circuit is getting smaller and smaller, due to the vertical connection, the manufacturing process needs to be carried out in two stages, and the process of vertical connection, in the manufacturing process It is difficult to standardize, it is difficult to improve the yield rate, and it is easy to fail, which increases the overall cost

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