An Integrated Capacitance-Ultrasound Tomography Sensor
A technology of ultrasonic tomography and capacitance tomography, which is applied in the direction of material capacitance, material analysis by using sound wave/ultrasonic wave/infrasonic wave, instrument, etc. It can solve the problems that cannot be realized, achieve good overall thickness, reduce error, and excellent The effect of measuring performance
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[0026] The preferred embodiments will be described in detail below in conjunction with the accompanying drawings. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.
[0027] figure 1 It is a structural diagram of the electrode array plate of the electrical capacitance tomography sensor provided by the present invention; wherein, (a) is the side of the electrode array plate facing the measured channel; (b) the side of the electrode array plate facing away from the measured channel. Wherein, the middle of the electrode array plate 1 is a substrate of non-conductive material; the side of the substrate facing the measurement channel is the front, and the measuring electrodes 3, the measuring electrode leads 2, the shielding electrodes 4 between the measuring electrodes and the two ends of the measuring electrodes are arranged. An end shielding electrode 5 ; the other side of the substr...
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