Graphene pressure sensors

Abstract

Semiconductor nano pressure sensor devices having graphene membrane suspended over open cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.

Description

Technical field [0001] The field relates generally to semiconductor nanodevices for sensing pressure and, in particular, to semiconductor nanopressure sensor devices constructed using thin graphene films. Background technique [0002] Typically, semiconductor nano-pressure sensor devices are used to measure the pressure of, for example, gases or liquids, and are used in various control and real-time monitoring applications. Semiconductor nano-pressure sensor devices can also be used indirectly to measure other variables such as fluid flow, gas flow, velocity, water level and altitude. Commonly used pressure sensors implement strain gauge devices with an active membrane made of silicon (single crystal), polycrystalline silicon thin film, bonded metal foil, thick film or sputtered thin film, etc. Typically, the thinner the active membrane, the greater the membrane material deforms in response to external pressure, thereby providing greater sensitivity and accuracy. However, ...

AI Technical Summary

Problems solved by technology

However, fabricating ultra-thin silicon membranes for use in pressure sensor devices is challenging due to the fragility of the material

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