Polymer piezoelectric gas sensor system for detecting gases

Abstract

The invention provides a polymer piezoelectric gas sensor system for detecting gases. The system comprises a gas passing pipe, a magnetic valve, a filter, a thermostatic chamber, a gas sensor array, a micro-compressor, a frequency meter and a control computer. The gas passing pipe is connected with the magnetic valve, the thermostatic chamber and the micro-compressor successively. The magnetic valve is connected with the filter. The sensor array is arranged in the thermostatic chamber. The sensor array is connected with the frequency meter through a wire. The frequency meter is connected with the control computer. The polymer piezoelectric gas sensor system can detect complex gases, and is advantaged by small size, low power consumption, strong applicability for detecting different gases and good selectivity. By utilizing the electron beam scattering method, thin polymer films are deposited on a quartz wafer, and the thickness of thin films and the uniformity of surfaces of the thin films can be controlled accurately. The system has advantages of simple and rapid operations and wide applicability, detections are qualitative but not quantitative, and the system is suitable for large-scale primary screening.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a polymer piezoelectric gas sensor system for detecting gas. Background technique [0002] Gas sensing has broad application prospects in the fields of atmospheric pollution detection, flammable, explosive, toxic and harmful gas detection, robot disease diagnosis, and military affairs. The gas sensors currently used are mainly conductance-controlled sensors (there are two types of bulk conductance control and surface conductance control), such as the gas sensor with the publication number CN114655A, whose structure mainly includes a layer of metal oxide gas-sensitive semiconductor (such as ZnO, SnO 2 etc.) and a heater, the principle of which is to detect the gas content based on the nature of the redox property of the gas gaining and losing electrons on the surface of the gas-sensitive semiconductor. This type of gas sensor needs to be heated to about 300°C to ensure the sm...

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Problems solved by technology

Therefore, this type of gas sensor has the following disadvantages: 1. It needs to heat the temperature control device, which increases the volume, power consumption and complexity of the sensor: it is inconvenient to use the current microelectronics process to make it; 2. The integration is not high because of the high heating. The temperature makes it more difficult to integrate the signal processing circuit and the sensor on the same substrate; third, the sensitivity to most organic gases with weak redox properties is not high

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