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Surface texture measurement device, controller thereof, and method for controlling the same

A technology for measuring equipment and surface texture, which is applied in the field of controlling the surface texture measuring equipment, and can solve problems such as errors between measurement ranges

Active Publication Date: 2013-09-18
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Range-to-range error occurs in each displayed range of R1 to R3

Method used

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  • Surface texture measurement device, controller thereof, and method for controlling the same
  • Surface texture measurement device, controller thereof, and method for controlling the same
  • Surface texture measurement device, controller thereof, and method for controlling the same

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Embodiment Construction

[0030] The details shown here are examples and are only for the purpose of describing and detailing the embodiments of the present invention, and are presented in the manner considered to be the most useful and easy to understand the principles and concepts of the present invention. For this reason, no attempt has been made to show structural details of the invention in more detail than is necessary for understanding the basic principles of the invention, the description, taken in conjunction with the accompanying drawings, will make apparent to a person skilled in the art how to implement the invention in practice.

[0031] Hereinafter, embodiments of the present invention are described with reference to the drawings. exist figure 1 Among them, the surface texture measuring device 10 according to the present embodiment has a conventional surface texture measuring device 90 similar to that described above (see Figure 7 )Configuration. Specifically, such as Figure 7 As show...

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Abstract

A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki = rDATAi / DATAi, a display resolution DIVi = DATAi / ADi, and a corrected display resolution cDIVi = DIViXki; and displaying the corrected display value cDIVi = DIViXki.

Description

technical field [0001] The present invention relates to a surface texture measuring device, a controller for the surface texture measuring device, and a method for controlling the surface texture measuring device. Further, the present invention relates to a surface texture measuring device having a plurality of display ranges, and a method for controlling the surface texture measuring device. Background technique [0002] In general, surface texture measuring devices are known to scan the surface of a workpiece by means of a probe to measure its surface texture (surface roughness, undulations, topography, etc.). In the surface texture measurement equipment, the probe moves in a fixed direction (X-axis direction), and is displaced in the vertical direction of the probe (Z-axis direction) due to the unevenness of the workpiece surface. The detection signal is amplified or AD conversion is performed, and then the signal is displayed on the display as a function of the moving d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20G01B21/30
CPCG01B21/042G01B21/30G01B5/28
Inventor 金松敏裕本田博臣
Owner MITUTOYO CORP
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