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Microwave power sensor with multi-cantilever structure

A microwave power and sensor technology, applied in the direction of electric power measurement by thermal method, can solve the problem of microwave signal consumption, etc., and achieve the effects of improved compatibility and repeatability, good linearity, and determinable error range

Inactive Publication Date: 2013-09-04
SOUTHEAST UNIV
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  • Application Information

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Problems solved by technology

The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement

Method used

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  • Microwave power sensor with multi-cantilever structure

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Embodiment Construction

[0019] The multi-cantilever beam structure microwave power sensor of the present invention uses GaAs or Si material as the substrate 1, is provided with the microstrip line 2 on the substrate 1, connects several mutually parallel, different lengths and microstrip lines on the cantilever beam anchor region 21 The cantilever beams 3 perpendicular to the strip line 2, the group of cantilever beams 3 are suspended above the microstrip line 2, and the pressure welding fast 4 is placed under the free ends of the cantilever beams 3.

[0020] The manufacturing process of the microwave power sensor with the multi-cantilever beam structure is compatible with the standard Si process or GaAs process.

[0021] The multi-cantilever beam structure microwave power sensor is different from the previous online microwave power sensor based on MEMS technology. This structure uses cantilever beams of different lengths suspended above the microstrip line to induce microwave power and generate displa...

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Abstract

The invention discloses a microwave power sensor with a multi-cantilever structure. The microwave power sensor comprises a substrate, and a micro-strip line, a cantilever anchoring region and a plurality of pressure welding blocks, which are arranged on the substrate, wherein the cantilever anchoring region and the pressure welding blocks are arranged on the two sides of the micro-strip line respectively; a plurality of cantilevers which are parallel to one another and hung in the air are arranged above the micro-strip line; the cantilevers and the micro-strip line are vertical and have different lengths; and one end of each cantilever is arranged on the cantilever anchoring region, and the other end of each cantilever are correspondingly hung above one pressure welding block. According to the microwave power sensor, the displacements of the cantilevers are caused by the attraction of the microwave power transmitted on the micro-strip line to the cantilevers of different lengths, and the measurement of the microwave power transmitted on the micro-strip line is realized by detecting the number of the cantilevers of different lengths, which are placed in parallel and contacted with the pressure welding blocks, so that the sensitivity of the power sensor can be improved, the structure can be simplified, digital output is realized, and the error range is controlled.

Description

[0001] technical field [0002] The invention belongs to the technical field of microelectronic devices, and relates to a structure for measuring microwave power transmitted on a microstrip line. [0003] Background technique [0004] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement. In recent years, three types of online microwave power sensor structures based on MEMS technology have been proposed at home and abroad: one is to use the ohmic loss on the coplanar waveguide signal line, and convert it into thermoelectric potential output through a thermal pile placed ...

Claims

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Application Information

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IPC IPC(8): G01R21/02
Inventor 韩磊姜文
Owner SOUTHEAST UNIV
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