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Method for measuring grating diffraction efficiency based on compensation algorithm

A technology of grating diffraction and measurement method, which is applied in the field of spectroscopy and can solve the problems of measurement error and inaccurate measurement results.

Active Publication Date: 2013-07-31
长春长光格瑞光电技术有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

[0005] In order to solve the problem that the existing grating diffraction efficiency measurement method has measurement error and leads to inaccurate measurement results, the present invention provides a method for measuring grating diffraction efficiency based on a compensation algorithm

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  • Method for measuring grating diffraction efficiency based on compensation algorithm
  • Method for measuring grating diffraction efficiency based on compensation algorithm
  • Method for measuring grating diffraction efficiency based on compensation algorithm

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specific Embodiment approach 1

[0033] Specific implementation mode 1. Combination figure 1 , figure 2 and Figure 4 Describe this embodiment mode, a kind of grating diffraction efficiency test method based on compensation algorithm, its process is realized by the following steps:

[0034]Step 1. High-precision wavelength calibration of the pre-monochromator. Scan the characteristic spectral lines of the mercury lamp, and establish the relationship between the wavelength and the number of scanning steps.

[0035] Step 2, preparing the plane grating 16 to be measured and the reference plane mirror 17 . It is required that the size and coating of the planar grating 16 to be tested and the reference plane reflector 17 be consistent, and input the basic parameters of the planar grating 16 to be tested into the computer, such as reticle density, blaze wavelength, wavelength range to be measured, etc.; open Test the power supply, light source, detector and computer, and measure the diffraction efficiency afte...

specific Embodiment approach 2

[0053] Specific embodiment two, combine image 3 Describe this embodiment, this embodiment is the device of the test method of grating diffraction efficiency based on the compensation algorithm described in the first embodiment, the device includes a light source system, a pre-monochromator, a measuring monochromator, a detection system 22 and Controller 23; the light source includes a tungsten lamp 1, a deuterium lamp 2, a first plane reflector 3 and a second plane reflector 4, and a condenser 5; the front monochromator includes a first incident slit 6, a first Concave collimator mirror 7, spectroscopic grating group 8, first turntable 9, first concave imaging mirror 10, first exit slit 11 and pre-monochromator housing 12; the measuring monochromator includes a second entrance slit Slit 14, the second concave collimator mirror 15, the second turntable 18, the second concave imaging mirror 19, the second exit slit 20 and the measuring monochromator housing 21; the beams emitte...

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Abstract

The invention provides a method for measuring grating diffraction efficiency based on a compensation algorithm and relates to the technical field of spectrum. The method solves the problems of measurement error and inaccurate measurement result in the conventional grating diffraction efficiency measurement method. The method comprises the following steps: performing wavelength calibration on a front monochromator; preparing a to-be-measured plane grating and a reference plane reflector; measuring the reflection luminous flux of the reference plane reflector; inputting basic parameters, such as groove density, to-be-measured wavelength range and blaze wavelength, of the to-be-measured plane grating, and measuring the diffraction luminous flux of test wavelength of the be-measured plane grating; and calculating emergent spectrum broadening width caused by grating chromatic dispersion and light beam section factor caused by grating rotation, calculating the measurement value with an error, and calculating the diffraction efficiency of the to-be-measured grating based on the compensation algorithm and according to a compensation model. The measurement method can set starting wavelength, terminating wavelength and scanning step length, and has the function of automatically correcting the measurement result. The measurement method is simple, and the measurement process is stable in performance and high in automation degree.

Description

technical field [0001] The invention relates to the field of spectrum technology, in particular to a method for measuring grating diffraction efficiency based on a compensation algorithm. Background technique [0002] Diffraction gratings (hereinafter referred to as gratings) are the core components of spectroscopic analysis instruments. Diffraction efficiency is one of the most important technical indicators for evaluating the performance of gratings, and it is also the basic factor for evaluating the energy transmission characteristics of spectroscopic instruments. Diffraction efficiency is divided into absolute diffraction efficiency and relative diffraction efficiency. In actual measurement, the diffraction efficiency usually refers to the relative diffraction efficiency, that is, the ratio of the diffracted luminous flux of a given order and wavelength received by the detector to the reflected luminous flux received by the standard reflector. The same grating has diff...

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Application Information

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IPC IPC(8): G01M11/02
Inventor 曹海霞陈少杰巴音贺希格齐向东潘明忠崔继承唐玉国
Owner 长春长光格瑞光电技术有限公司
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