Clamp for reversely fixing a plurality of substrates of magnetic-control sputtering equipment and clamping method thereof
A magnetron sputtering and substrate technology, applied in the direction of sputtering plating, ion implantation plating, metal material coating process, etc., to achieve the effect of preventing blocking
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[0018] The present invention will be further described in detail below in combination with specific embodiments.
[0019] The present invention is a fixture used for fixing multiple substrates upside down for magnetron sputtering equipment, including a base 1 and a fixing piece.
[0020] Such as figure 1 As shown, the base 1 is provided with several dovetail grooves 2, and the top surface of the dovetail groove 2 is provided with a plurality of rectangular grooves 3 for placing the substrate 5 at intervals, and the size of the rectangular grooves 3 is uniform. The area of the substrate 5 is basically the same, the four corners of the rectangular groove 3 are respectively fixed with gaskets 4, and the effect of the gasket 4 is that when the substrate 5 is put into the rectangular groove 3, the thickness of the substrate 5 can be reduced. The contact area with the bottom surface of the rectangular groove 3, thereby reducing the wear rate of the substrate 5, such as image 3 ...
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