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Portable raman spectrometer based on spectral analysis of micro electro mechanical system

A technology of micro-electromechanical systems and Raman spectrometers, applied in the field of spectral analysis instruments, can solve problems such as reducing luminous flux and sensitivity, and difficult weak signal detection, so as to avoid adverse effects, improve sensitivity, and reduce product costs.

Inactive Publication Date: 2013-07-10
许春 +2
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  • Abstract
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  • Application Information

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Problems solved by technology

The incident slit is still used in the detection light path of these spectrometers based on MEMS technology, which reduces the luminous flux and sensitivity, and is difficult to be used for weak signal detection such as Raman spectroscopy.

Method used

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  • Portable raman spectrometer based on spectral analysis of micro electro mechanical system
  • Portable raman spectrometer based on spectral analysis of micro electro mechanical system
  • Portable raman spectrometer based on spectral analysis of micro electro mechanical system

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Embodiment Construction

[0034] Such as figure 1 As shown, a portable Raman spectrometer based on MEMS spectral analysis, based on MEMS spectral analysis technology, includes: a laser light source, a Raman probe and a spectral detection system 4 of a spectrometer, the laser beam emitted by the laser 1 passes through The Raman probe 2 is irradiated on the sample 3 to excite the Raman scattered light of the sample 3, and the Raman probe 2 collects part of the Raman scattered light and transmits it to the spectral detection system 4, wherein:

[0035] The laser light source includes a semiconductor laser 1, which generates a laser with a power not less than 200 milliwatts and a narrow linewidth not greater than 0.2 nanometers;

[0036] The Raman probe 2 includes two optical paths: an output laser optical path and an optical path for collecting Raman scattered light, wherein the optical path for collecting Raman scattered light does not include a filter for filtering Rayleigh scattered light;

[0037] De...

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Abstract

The invention provides a portable raman spectrometer based on spectral analysis of a micro electro mechanical system. On the basis of the micro electro mechanical system, the portable raman spectrometer comprises a laser light source, a raman probe head and a spectrum detection system of a spectrograph, wherein the laser light source comprises a semiconductor laser which is used for generating lasers, the power of the generated lasers is not less than 200 milliwatts, and the line width of the generated lasers is not greater than 0.2 nanometers; the raman probe head comprises a laser outputting optical path and a raman scattered light collecting optical path which does not comprise a light filter for filtering rayleigh scattered light; and the spectrograph comprises the spectrum detection system which sequentially consists of a focusing lens I, a digital micromirror device (DMD) module I, a collimating lens, a chromatic dispersion optical grid, a focusing lens II, a digital micromirror device (DMD) module II, a de-chromatic dispersion optical grid, a focusing lens III, a single-point detector and a signal processor. The portable raman spectrometer has the advantages of being capable of keeping the resolution ratio of spectrum detection and improving the sensitivity of spectrum detection, being suitable for detection on weak signals such as raman signals, and the like.

Description

technical field [0001] The invention belongs to the technical field of spectroscopic analysis instruments, in particular to a portable Raman spectrometer based on microelectromechanical system (MEMS) spectroscopic analysis. Portable Raman spectrometer based on spectral analysis technology. Background technique [0002] Raman spectroscopy detection technology is a technology that uses laser light to obtain spectral information at the molecular level of a substance, and compares and analyzes the composition and concentration of the substance to be tested through a database. It has strong capabilities in non-destructive physical property analysis and identification. Due to its fast and accurate detection performance, no need for sample preparation, and suitable for on-site use, this technology has been widely used in food safety, drug inspection, drug detection, judicial identification, jewelry identification and environmental testing and other fields. In February 2009, the Ch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01J3/44
Inventor 许春殷海玮章炜毅
Owner 许春
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