Eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling

Abstract

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy. An air-flotation face is used for lubricating and supporting between the air-flotation plate and a lower installing plate. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree between the upper installing plate and the lower installing plate is decoupled through a flexible film. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of fully decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.

Description

Technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to an eddy current damping vibration isolator with double-layer air-floating orthogonal decoupling and flexible film angle decoupling. Background technique [0002] With the continuous improvement of ultra-precision processing and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision processing equipment and measuring instruments. Especially the ultra-large-scale integrated circuit processing equipment represented by the step-and-scan lithography machine has extremely high technology intensity and complexity, and its key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; the line...

AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability

The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide angular freedom of rotation around the horizontal axis for the upper and lower mounting plates, but due to the high angular stiffness of the rubber blocks, the angular freedom of motion cannot be effectively achieved Degree decoupling, the friction between the decoupling mechanism components of the angular motion freedom introduces additional stiffness, which restricts the vibration isolation performance

However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

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