Laser annealing device and laser annealing method
A technology of laser annealing and laser pulse, which is applied in the direction of laser welding equipment, electrical components, circuits, etc.
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[0026] figure 1 A schematic diagram of a laser annealing apparatus based on an embodiment is shown in . The laser light source 12 is driven by the driver 10 . The laser light source 12 uses, for example, a laser diode with an oscillation wavelength of 690 nm to 950 nm. In this embodiment, a laser diode with an oscillation wavelength of 800 nm is used.
[0027] The laser light source 12 has a plurality of horizontally long light emitting points. The plurality of light emitting points are arranged in a row in the direction of the long sides. The size ratio of the major axis direction and the minor axis direction of each light emitting point is, for example, 100:1. The dimension in the long-axis direction of the light-emitting points is almost equal to the interval between two adjacent light-emitting points. In other words, the luminous points and non-luminous regions are alternately arranged at equal intervals.
[0028] Generally, the spread angle of the laser beam in the ...
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