Adjustable gas distribution system and magnetron sputtering coating device comprising same

Abstract

The invention discloses an adjustable gas distribution system and a magnetron sputtering coating device comprising the adjustable gas distribution system. The adjustable gas distribution system comprises at least two parallel gas distribution pipes; a flowmeter is arranged on each gas distribution pipe; blowing parts are arranged on two adjacent gas distribution pipes in a staggered manner and comprise a plurality of air holes which are of the same specification and formed uniformly; each air hole is formed in the radial direction of one gas distribution pipe; and the air holes are arranged in the axial directions of the gas distribution pipes in sequence. The gas distribution system is provided with at least two gas distribution pipes, and the blowing parts are on two adjacent gas distribution pipes in a staggered manner, so that gas blown out by the gas distribution system can reach a target surface uniformly, and then a film is ensured uniformity; the flowmeters are arranged on the gas distribution pipes, so that the flow rate of gas can be adjusted in real time, namely, the flow rate of gas can be adjusted accurately according to the distance between the target surface and the surface of an object to be coated, and different coating thicknesses; and the flow rates of gas blown out from all the gas distribution pipes can be the same, so that the purposes of controlling in real time and coating accurately can be achieved.

Description

technical field [0001] The invention relates to the technical field of magnetron sputtering coating, in particular to an adjustable gas distribution system and a magnetron sputtering coating device including the adjustable gas distribution system. Background technique [0002] Magnetron sputtering coating technology is a widely used coating technology method at present. It is widely used in optics, microelectronics, wear resistance, corrosion resistance, decoration and other industrial fields to provide reliable and stable thin film coatings. Such as decorative color coating, mobile phone case coating, architectural glass low-e coating, ITO transparent conductive glass coating, etc. [0003] The uniformity of the magnetron sputtering coating is very important, especially for the coating of optical and microelectronic products, and its uniformity has an important impact on the quality and yield of the product. There are many factors that affect the uniformity of the magnetro...

AI Technical Summary

Problems solved by technology

However, this hybrid air distribution pipe has the following defects: 1. Although this air distribution system can further optimize the uniformity of air distribution, it lacks adjustability. It is a preset and fixed device with only a certain scope of application. In the application fields that require high film consistency, when the gas flow rate changes, the pores are blocked, the gas type changes, and the target-base distance is uneven, the application effect will decrease; 2. The adjustment of the uniformity of the gas distribution is lack of quantification Indicators, mostly judged by experience

Although this binary air distribution tube is adjustable, it does not have the function of measuring the amount of air distribution in different areas, and cannot achieve quantitative measurement. Therefore, when plating different film thicknesses, it can only be adjusted and judged based on experience, so it cannot be applied. into precise coating, and its gas distribution method is complex in structure, high in production cost, difficult in operation and maintenance

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