Full light path aberration correction system and full light path aberration correction method based on double Hartmann sensors
A technology of aberration correction and sensors, applied in optics, instruments, optical components, etc.
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[0076] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0077] Such as figure 1 As shown, the present invention is an all-optical aberration correction system based on double Hartmann sensors, which includes a high-energy laser 1, a wavefront corrector, a beam splitter 4, a beam quality evaluation system 5, and an inner optical path Hartmann sensor 6 , the first Hartmann sensor 7, the second Hartmann sensor 8, data fusion assembly and high-voltage amplifier 11; the wavefront corrector includes a tilting mirror 2 and a deformable mirror 3, and the data fusion assembly includes a first computer 9 and a second computer 10. The high-power laser light emitted by the high-energy laser 1 successively enters the tilting mirror 2 and the deforming mirror 3 at a small angle, and then enters the front surface of the beam splitter 4 at a certain angle; wherein, a part of the energy (mostly) is split ...
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