Elliptic partial measurement device and measurement method based on spatial light modulator
A technology of spatial light modulator and measuring device, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as azimuth deviation, lower measurement accuracy, and system instability, and achieve fast modulation speed, improved accuracy, and modulation high precision effect
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[0039] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0040] Such as figure 1 and Figure 5 As shown, an ellipsometry device based on a spatial light modulator of the present invention includes an incident arm 1 with a polarization state and a spot size control component, a receiving arm 2 with a polarization state and a spot size control component, and a receiving arm 2 with a A control system 3 in which the incident arm 1 of the polarization state and spot size control component is connected to the receiving arm 2 with the polarization state and spot size control component;
[0041] The incident arm 1 with polarization state and spot size control components includes sequentially arranged along the incident light path:
[0042] Laser 4, used to emit single-frequency light that irradiates the object to be measured;
[0043] A collimating beam expanding device 5, configured to collimat...
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