Symmetrical structure terahertz wave polarization beam splitter
A polarization beam splitter and symmetrical structure technology, applied in the direction of instruments, light guides, optics, etc., can solve the problems of low polarization beam splitting rate, complex structure, difficult production, etc., and achieve low cost, high beam splitting rate, and simple structure Effect
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[0016] The material of the substrate is silicon dioxide, the length is 2000 μm, the width is 1800 μm, and the thickness is 200 μm; the material of the waveguide is silicon, and the thickness is 40 μm. The grooved waveguide at the upper end is composed of two horizontal waveguides and a concave waveguide. The length of the concave waveguide is 1000 μm and the width is 80 μm. The depth of the concave waveguide is 80 μm. The length of the two horizontal waveguides is 500 μm and the width is Both are 80 μm. The groove waveguide at the lower end is composed of a left horizontal waveguide, a right horizontal waveguide and a concave waveguide. The length of the concave waveguide is 1000 μm, the width is 80 μm, the depth of the concave waveguide is 80 μm, and the length of the left horizontal waveguide is 300 μm. The width is 80 μm; the right horizontal waveguide has a length of 500 μm and a width of 80 μm. The waveguide width of the ring waveguide is 80 μm, and the radius of the out...
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