Film heat flux sensor and preparation method thereof

A technology of heat flow sensor and thin film, which is applied to thermometers, instruments, scientific instruments, etc. that are directly sensitive to heat, electric/magnetic components, etc., can solve the problems of slow response time and large volume, so as to improve the reliability level and realize batch production Production, the effect of reducing manufacturing costs

Inactive Publication Date: 2013-02-13
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the heat flow measurement on the surface of the aircraft adopts the arrangement of temperature sensors on the surface of the shell to detect the temperature difference at different positions to calculate the heat flux density, which has the disadvantages of large volume and slow response time.

Method used

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  • Film heat flux sensor and preparation method thereof
  • Film heat flux sensor and preparation method thereof

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Effect test

Embodiment 1

[0036] see figure 1 , the thin film heat flow sensor 1 comprises a substrate 2, a transition layer 3 disposed on the substrate 2, a thin film thermocouple array disposed on the transition layer 3; the thin film thermocouple array consists of more than two A electrodes 4 and The thin-film thermocouple 10 of the B electrode 5 is formed in series through the external contact 11; the contact of the A electrode 4 and the B electrode 5 is provided with a thick thermal barrier layer 6; the external contact 11 is provided with a thin thermal barrier layer 7; The two external ends of the two or more thin-film thermocouples 10 connected in series are respectively connected to the corresponding compensation wires 8 via a pad 9 (see figure 1 ).

[0037] Wherein, the material of the substrate 2 is Al 2 o 3 Ceramics, the diameter of which is 50 mm to 150 mm and the thickness of 0.5 mm to 1 mm; the material of the transition layer 3 is Ta 2 o 5 , with a thickness of 0.05 μm to 0.1 μm; t...

Embodiment 2

[0039] see figure 2 , the preparation method of the thin film heat flow sensor comprises the following steps:

[0040] (1) For Al with a diameter of 50mm to 150mm and a thickness of 0.5mm to 1mm 2 o 3 The substrate is cleaned to remove oil and impurities on the polished surface of the substrate;

[0041] (2) Set the substrate and the stainless steel mask of the R-type PtRh13-Pt thermocouple PtRh13 electrode together, and clamp it with a stainless steel fixture and put it on the planet carrier of the ion beam sputtering coating machine;

[0042] (3) Deposit Ta with a thickness of 0.05 μm to 0.1 μm by ion beam sputtering 2 o 5 Transition film and PtRh13 thermocouple thin film of 0.1 μm ~ 0.2 μm, remove the stainless steel mask;

[0043] (4) Set the substrate and the stainless steel mask of the R-type PtRh13-Pt thermocouple Pt electrode together, and clamp it with a stainless steel fixture and put it on the planet carrier of the ion beam sputtering coating machine;

[0044...

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Abstract

The invention discloses a film heat flux sensor and a preparation method thereof. The film heat flux sensor is characterized in that a high temperature-resistant film thermocouple array (thermopile) is prepared on the surface of a substrate by a micromachining technology; a thick heat barrier layer and a thin heat barrier layer are arranged on the high temperature-resistant film thermocouple array; and through sensing the difference between temperatures under the thick heat barrier layer and the thin heat barrier layer, the film heat flux sensor can measure a heat flux according to the height difference of the thick heat barrier layer and the thin heat barrier layer. The film heat flux sensor can measure heat fluxes of middle and outer layer materials of a high-speed aircraft in flight and provides data reference for a heat protection design. The preparation method has simple processes and a reliable structure.

Description

technical field [0001] The invention belongs to the technical field of thin-film special sensors, and in particular relates to a thin-film sensor based on micromachining technology and a preparation method thereof. More specifically, the present invention relates to a thin-film heat flow sensor and its preparation method. The heat flow is measured by a thin-film thermopile. The thin-film heat flow sensor has simple manufacturing process, fast response time and high measurement accuracy. Background technique [0002] Aircraft or missile models are tested in high-speed wind tunnels. It is necessary to test and analyze the heating conditions of each point on the aircraft under different Mach numbers and different angles of attack, and accurately calculate the mechanical properties of materials under heating conditions, so that Select suitable materials and take heat-proof measures to ensure the safe and reliable high-speed flight of the aircraft. How to accurately and quickly ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N25/20G01K7/02B81C1/00
CPCG01K7/028
Inventor 何峰谢贵久景涛颜志红张建国董克冰
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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