Dual-mode system used for film growth and control method of dual-mode system
A dual-mode system and thin film growth technology, which is applied in crystal growth, single crystal growth, single crystal growth, etc., can solve the problem that the growth methods cannot be completely integrated
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[0046] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.
[0047] For a better understanding of the components and marks in the figure, please refer to figure 1 , first explain some components and labels in the figure, A is a mass flow controller (Mass Flow Controller), B is a fluid pipeline, C is a pipeline connection, and D is a non-pipeline connection. In addition, figure 2 and image 3 The middle arrow marks the fluid flow direction.
[0048] Please refer to figure 1 , the present invention discloses a dual-mode system for thin film growth, which includes a non-reactive gas source 10, a first reaction source 20, a second reaction source 30, a reaction Chamber 40 and control device. The control device controls the dual-mode sys...
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