Defoaming device for stripping developing solution KOH/NaOH

Abstract

The invention relates to a defoaming device for stripping developing solution KOH / NaOH. An air drafting pipe and a plurality of liquid medicine spraying parts are arranged above a substrate transmission box; a transmission idler pulley is arranged below the substrate transmission box; a net-shaped heating pipe is arranged below the transmission idler pulley; net-shaped defoaming cotton is arranged on the lower surface of the heating pipe; a liquid medicine draining port is arranged at the bottom of the box body; channel openings for connecting a previous process and a following process and transmitting a glass substrate are arranged on two sides of the substrate transmission box; a liquid medicine reflowing port on a liquid medicine groove is positioned below a liquid medicine level; a new liquid medicine spraying part is arranged above the liquid medicine in the liquid medicine groove; the liquid medicine draining port is connected with the liquid medicine groove by a pipeline; a liquid outlet of the liquid medicine groove is connected with a spraying pump by the pipeline; and a liquid supplying pipeline is connected with the spraying parts of the substrate transmission box, so that a complete liquid supplying system is formed. By adopting the defoaming device, most of foams produced in a production pprocess can be removed, cooperation is brought to a production technology, and the liquid medicine is prevented from polluting, so that normal production can be ensured, and quality of products can be improved.

Description

technical field [0001] The present invention relates to a defoaming device, in particular to a defoaming device for KOH / NaOH stripping developer, mainly aimed at the foam produced when the solution of KOH and NaOH is used as the stripping solution and developing solution, or some drugs in other production processes. The foam generated by the liquid will undergo a series of transformations on the production line, so that the foam will be automatically broken by physical methods to achieve the purpose of eliminating the foam. This device can continue to be used in many fields that require defoaming. Background technique [0002] In the LCD, TFT and TP processing industries, KOH or NaOH solutions are often used as stripping solutions and developing solutions. This inorganic alkaline solution is prone to foam during the production process of the production line. When the concentration reaches 3%-5% (g / L), when the temperature is 45°C-50°C, there will be a lot of foam caused by t...

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Problems solved by technology

[0002] In the LCD, TFT and TP processing industries, KOH or NaOH solutions are often used as stripping solutions and developing solutions. This inorganic alkaline solution is prone to foam during the production process of the production line. When the concentration reaches 3%-5% (g / L), when the temperature is 45°C-50°C, there will be a lot of foam caused by the reaction and washing of the liquid medicine, and it is not easy to eliminate, which causes great inconvenience to production

[0003] The commonly used defoaming methods are to use defoaming agent, increase the air extraction and discharge the foam overflow, but the defoaming agent is easy to pollute the products in production, so it cannot be added; increasing the exhaust air can pump a part of the foam Walking, negative pressure is formed, which accelerates the bursting of the foam, but since the production must be maintained at a certain temperature (such as 50°C), increasing the pumping will also remove the heat, causing the temperature of the liquid medicine to drop, which is not suitable for production. The requirements of the process, so the amount of air pumping used is limited, and the foam is very large, which cannot achieve the required defoaming effect; the third method is to let the foam flow into the liquid medicine tank, add a baffle in the liquid medicine tank, and the foam is high. It overflows through the edge of the baffle, because there are too many foams and the flow rate of the liquid medicine is relatively large, so the foam flowing into the liquid medicine tank is very limited, and many foams still stay in the box of the production line, so the effect is not obvious, so there is an urgent need for a A more effective defoaming solution

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