Mems resonator
A resonator, ring resonance technology, used in electrical components, impedance networks, etc.
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[0058] The present invention provides a MEMS resonator wherein the resonator mass is anchored in a closed loop at points around the loop. A set of ring-comb electrode structures are fixed on the ring, e.g. at locations between the anchor points, to couple input (drive) and output (sense) signals to / from the resonator mass .
[0059] The resonator of the present invention has a ring-shaped frame shape, which may be a ring or a symmetrical polygonal ring, such as a square. The structure has an in-plane vibration mode shape in which segments of the structure bend alternately inwards and outwards, while the width of the structure remains substantially constant. Anchors are positioned on the nodes of the mode shape, ie on the boundaries between the partitions. At the nodal points (or quasi-nodal points), the material does not move significantly during vibration.
[0060] The structural material is a conductive material, such as doped monocrystalline silicon, doped polycrystallin...
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