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High-speed and high-resolution laser heterodyne interferometry method and high-speed and high-resolution laser heterodyne interferometry device

A laser heterodyne interference, high-resolution technology, applied in the field of laser applications, can solve problems such as measurement speed limitations, and achieve the effect of simplifying design, reducing costs, and high-resolution

Active Publication Date: 2013-01-02
HARBIN INST OF TECH
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Problems solved by technology

[0008] Aiming at the shortcomings of the existing laser heterodyne interferometer, the present invention proposes a high-speed and high-resolution laser heterodyne interferometry method and device, which improves the measurement accuracy of laser heterodyne interferometry and solves the limitation of the measurement speed by the frequency difference of the laser light source. question

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  • High-speed and high-resolution laser heterodyne interferometry method and high-speed and high-resolution laser heterodyne interferometry device

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Embodiment Construction

[0035] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0036] A high-speed and high-resolution laser heterodyne interferometry device, the device includes a frequency-stabilized laser 1, a photodetector A11, a photodetector B12, and the device also includes a polarization beam splitter A2, an optical path compensation block 3, a quarter-wave Sheet A4, plane mirror A5, reference prism 6, polarization beam splitter B7, measuring prism 8, quarter wave plate B9, plane mirror B10, phase meter A13, phase meter B14, switch circuit 15, measurement circuit 16; wherein, polarization beam splitter The prism A2 is located at the output end of the frequency-stabilized laser 1; the optical path compensation block 3, the quarter-wave plate A4 and the plane mirror A5 are sequentially placed on the reflection direction of the polarization beam splitter prism A2, and the reference prism 6 is placed on the reflection directi...

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Abstract

The invention discloses a high-speed and high-resolution laser heterodyne interferometry method and a high-speed and high-resolution laser heterodyne interferometry device, and belongs to the technical field of laser application. Reference light and measuring light which are separated from each other spatially are adopted, balance design for a measuring light path is carried out, and two interferometry signals with opposite Doppler frequency shifts are generated by the method, and are selectively used for interferometry according to the movement direction and the speed of a measured object. The high-speed and high-resolution laser heterodyne interferometry method and the high-speed and high-resolution laser heterodyne interferometry device have the advantages that influence of temperature change to measurement is reduced, frequency aliasing in an interferometer is eliminated, measurement precision of heterodyne interferometry is improved, and the problem of limitation on measuring speed due to frequency difference of laser light sources is solved.

Description

technical field [0001] The invention belongs to the technical field of laser applications, and mainly relates to a high-speed and high-resolution laser heterodyne interferometry method and device. Background technique [0002] Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy and production efficiency; at the same time, new challenges are raised for the measurement accuracy, resolution and speed of heterodyne interferometry. [0003] In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abroad have done a lot of res...

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Application Information

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IPC IPC(8): G01B11/02G01B11/04G02B27/28
Inventor 谭久彬刁晓飞胡鹏程白洋杨千惠
Owner HARBIN INST OF TECH
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