Explosion-proof source bottle for diffusion technology

Abstract

The invention discloses an explosion-proof source bottle for a diffusion technology. The explosion-proof source bottle for the diffusion technology comprises an air inlet pipe, an air outlet pipe, a temperature measuring pipe, a metal block and a buzzer, wherein through the design of automatic pressure-relieving and alarming functions, a metal block pressure relief device is additionally arranged on the source bottle, so that when air pressure in the source bottle is too high, the metal block is ejected to relieve pressure, a circuit is switched on and the buzzer alarms, and when the air pressure is restored, the metal block falls down and the buzzer stops alarming. The explosion-proof source bottle for the diffusion technology has the advantage as follows: when the air pressure in the source bottle is too high, the air pressure is automatically relieved and people are informed of checking by alarming, so that the danger caused by explosion of the source bottle is successfully avoided.

Description

technical field [0001] The invention relates to equipment used in a liquid source diffusion process in a solar cell sheet preparation process, in particular to an explosion-proof source bottle used in the diffusion process. Background technique [0002] Semiconductor industries such as solar energy and integrated circuits need to use liquid POCl 3 Do phosphorus source diffusion to form a PN junction. The phosphorus source is placed in a diffusion source bottle. Usually, the basic structure of the source bottle is composed of an air outlet pipe, an air inlet pipe, a temperature measuring tube and a source bottle; the bottom of the source bottle is a structure with slightly curved ends and a flat bottom, such as figure 1 shown. Liquid POCl in the source bottle 3 , the N 2 Liquid POCl 3 , carrying gaseous POCl 3 Enter the diffusion furnace to complete the phosphorus diffusion process. But if the inlet and outlet pipes are reversed, or N 2 Excessive air intake pressure o...

AI Technical Summary

Problems solved by technology

But if the inlet and outlet pipes are reversed, or N 2 Excessive air intake pressure, or blockage of the air outlet pipeline, can easily lead to excessive air pressure in the source bottle, which will cause the source bottle to explode

while POCl 3 Highly toxic, volatile, severely corrosive to the skin, and extremely dangerous after a burst bottle leaks

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