Silicon tetrachloride hydrogenation reaction device and solid raw material continuous feeding device thereof

Abstract

The invention discloses a silicon tetrachloride hydrogenation reaction device and a solid raw material continuous feeding device thereof. The solid raw material continuous feeding device of silicon tetrachloride hydrogenation reaction comprises a storage tank and a metering tank which communicates with each other. Solid materials for the silicon tetrachloride hydrogenation reaction are stored in the storage tank. The metering tank is provided with a material outlet used for supplying the solid raw materials to the silicon tetrachloride hydrogenation reaction device. The metering tank is provided with an atmospheric pressure adjusting device which is used for adjusting the atmospheric pressure in the metering tank. According to the silicon tetrachloride hydrogenation reaction solid raw material continuous feeding device provided by the embodiment of the invention, the atmospheric pressure adjusting device is arranged on the metering tank, such that a difficulty in feeding from the storage tank with a relatively low atmospheric pressure to the silicon tetrachloride hydrogenation reaction device with a relatively high atmospheric pressure is effectively solved. The feeding device is advantaged in simple structure, convenient application, and high safety.

Description

technical field [0001] The invention relates to the technical field of polysilicon preparation, and more specifically, the invention relates to a silicon tetrachloride hydrogenation reaction equipment and a solid raw material continuous feeding device thereof. Background technique [0002] A large amount of silicon tetrachloride, a by-product produced in the polysilicon production process, will seriously pollute the environment if discharged directly. How to safely handle silicon tetrachloride has become a "bottleneck" restricting the development of the polysilicon industry. At present, the cold hydrogenation technology of silicon tetrachloride solves the problem of polysilicon by-products. [0003] Silicon tetrachloride cold hydrogenation technology is under a certain temperature and pressure, silicon tetrachloride, hydrogen, silicon powder and powdered catalyst are added to the reactor to convert silicon tetrachloride into trichlorosilane, the raw material for polysilicon...

AI Technical Summary

Problems solved by technology

Due to the high operating pressure of the cold hydrogenation technology, generally operating at 2.0-3.5MPa, and the solid material silicon powder and catalyst need to be added from the low-pressure device to the high-pressure reactor, the pressure difference is large, and in high temperature and high pressure, easily Under flammable and explosive working conditions, it is very difficult to feed the solid material into the reactor

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