Multipurpose in-situ microscale mechanical property tester under scanning electron microscope

Abstract

The invention discloses a multipurpose in-situ microscale mechanical property tester under a scanning electron microscope. The mechanical property tester comprises a frame base, a voice coil motor, a loading shaft, a grating ruler, a movable clamp, a fixed clamp, a sliding block and a force sensor. The voice coil motor is installed at one end of the frame base, the grating ruler for measuring displacement of the loading shaft is installed inside the voice coil motor, the loading shaft is driven by a magnet coil inside the voice coil motor to move, one end of the loading shaft is located inside the voice coil motor, and the movable clamp is installed at the other end of the loading shaft. A sliding groove is manufactured at the other end of the frame base, the sliding block is fixed on the sliding groove, the force sensor is installed at one end of the sliding block close to the voice coil motor, and the fixed clamp is installed on the force sensor. The multipurpose in-situ microscale mechanical property tester adopts the voice coil motor, avoids vibration caused by a stepping motor driving mode, can obtain clear amplification factor scanning electron microscope images in a loading state of a testing sample and can conduct in-situ drawing, compressing, bending and fatiguing mechanic performance testing.

Description

technical field [0001] The invention relates to a microscale mechanical property tester, in particular to a multipurpose in-situ microscale mechanical property tester under a scanning electron microscope. Background technique [0002] With the development of modern material science, microelectronics technology, biological and medical materials, the characteristic scale of samples is getting smaller and smaller. Therefore, there is an urgent need to test the mechanical properties of micro-scale samples. In the field of traditional macro-scale mechanical testing, uniaxial tension, compression, and bending are several testing methods that are widely used. They are popular because of their simple mechanical models and clear physical meanings of test parameters. Similarly, in the field of micro-scale mechanical testing, people still hope to use uniaxial tension, compression, and bending to perform tests, so that the technical experience of macro-mechanical testing can be well tr...

AI Technical Summary

Problems solved by technology

If the magnification of the scanning electron microscope is large, it is difficult to obtain a clear image

In addition, the dynamic frequency response of the stepper motor is slow, it is difficult to perform fast-moving cyclic loading and unloading tests, and it is impossible to monitor the crack growth online with a scanning electron microscope

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