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Direct optical drive scanning micro-mirror

A scanning micromirror and light-driven technology, applied in optics, optical components, microstructure technology, etc., can solve problems such as the failure of metal wire bonding process, achieve the elimination of metal wire bonding process, simple structure, improve reliability and safety effect

Inactive Publication Date: 2015-04-01
蚌埠尚维知识产权运营有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is a certain risk of failure in the metal wire bonding process

Method used

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  • Direct optical drive scanning micro-mirror
  • Direct optical drive scanning micro-mirror

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Embodiment Construction

[0018] Below in conjunction with accompanying drawing and embodiment the present invention will be further described: as Figure 1-2 As shown, it includes a micro-driver 1, a planar spring 2, a movable mirror 3 and a micro-lens 4. The output end of the micro-driver 1 links to each other with the input end of the planar spring 2, the output end of the planar spring 2 links to each other with the input end of the movable lens 3, and the output end of the microlens 4 links to each other with the input end of the micro-driver 1; each device includes 1 movable mirror 3, 2 planar springs 2, 2 micro-drivers 1 and 1 micro-lens 4, the movable mirror 3 is connected with 2 planar springs 2, and each planar spring 2 is connected with 1 micro-driver 1;

[0019] The micro-driver 1 is made using micro-machining technology, based on the bimetal effect, and is composed of multi-layer materials such as silicon, silicon dioxide, metal, metal oxide, etc., and is used to pass the externally input ...

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Abstract

The invention discloses a direct optical drive scanning micro-mirror comprising a micro-drive, a planar spring, a movable lens and a micro-lens, wherein the output end of the micro-drive is connected with the input end of the planar spring, the output end of the planar spring is connected with the input end of the movable lens, and the output end of the micro-lens is connected with the input end of the micro-drive; each device comprises one movable lens, two planar springs, two micro-drives and one micro-lens, the movable lens is connected with the two planar springs, and each planar spring is connected with one micro-lens; and the direct optical drive scanning micro-mirror disclosed by the invention is prepared by a silicon micromachining technology and can directly drive the lens to finish scanning through a special wavelength drive laser in the incident laser so as to avoid the lead bonding procedure related to traditional electric connection, and the direct optical drive scanning micro-mirror has simple structure and low cost.

Description

technical field [0001] The invention relates to a micro-electro-mechanical system device for optical scanning, in particular to a micro-driver directly driven by a laser. Background technique [0002] Micro optical scanning devices manufactured by silicon micromachining technology have very important applications in optical scanning, optical imaging, laser projection and other fields. Especially in the field of optical endoscopic imaging, imaging probes integrated with micro-optical scanning devices can scan in various diameters of the human body (such as blood vessels, digestive tracts, etc.), and combine with external optical imaging equipment to obtain Two-dimensional images or three-dimensional images of human tissue. [0003] Usually, micro optical scanning devices use aluminum or gold wire bonding technology to establish a stable and reliable electrical connection between the pad on the surface of the device and the external metal wire, so as to receive an external el...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10B81B7/00
Inventor 徐英舜
Owner 蚌埠尚维知识产权运营有限公司
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