A kind of tft array substrate detection method and detection device

Abstract

The embodiment of the invention provides a TFT (thin film transistor) array substrate detecting method and device, relating to the field of liquid crystal display manufacture and capable of improving the complete defect detection rate of the TFT array substrate data wires. The detecting method comprises the following steps: providing positive and negative alternate periodic testing voltage signals to data wires on the TFT array substrate; continuously collecting voltage from one end of each data wire to the other end of the data wire at internals of a preset distance to obtain continuous collection voltage values; and determining one or a plurality of defects of the data wires according to one or a plurality of mutations of the collection voltage values. The detecting method and device disclosed by the embodiment of the invention are applied to TFT array substrate detection.

Description

technical field [0001] The invention relates to the field of liquid crystal display manufacturing, in particular to a TFT (Thin Film Tansistor, Thin Film Field Effect Transistor) array substrate detection method and detection device. Background technique [0002] During the detection process of the TFT array substrate, the detection equipment needs to add the detection signal to the TFT array substrate through the probe, charge the pixel electrodes, and then use the modulator (Modulator) to simulate the display principle of the liquid crystal display for detection. After the pixel electrode is charged, the detection device detects the voltage of the pixel electrode, and compares the voltage value on the pixel electrode with the preset voltage values ​​of various defects, so as to determine the defect type of the TFT array substrate. [0003] In the process of realizing the detection of the above-mentioned TFT array substrate, the inventor found at least the following problem...

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Problems solved by technology

[0003] In the process of realizing the detection of the above-mentioned TFT array substrate, the inventor found at least the following problems in the prior art: when the data line of the TFT array substrate is disconnected, all pixel electrodes behind the breakpoint cannot be charged, so the detection equipment can only The first breakpoint where the data line break is detected

If there are still other disconnections after the breakpoint, it cannot be detected, so even after the first breakpoint is repaired, the TFT array substrate still has defects. The complete detection rate of defects is low, resulting in a high rate of defective products

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