Measurement method of lateral magnification of optical system based on line light source
A technology of lateral magnification and optical system, applied in the field of lateral magnification measurement of optical system based on line light source, can solve the problem of low repeatability of lateral magnification measurement, improve the repeatability of measurement results, reduce errors, and reduce errors Effect
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[0049] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0050] figure 1 It is a schematic diagram of the structure of the optical system lateral magnification measurement device based on the line light source, and its planar light path diagram is as follows figure 2 As shown; the device includes a line light source 1, an optical system 2, and an image sensor 3, and the line light source 1 is imaged to the surface of the image sensor 3 through the optical system 2, and, in the direction of the optical axis of the device and the row direction of the image sensor 3 In a determined plane, the line light source 1 is curved, and any position on the line light source 1 is quasi-focused and imaged on the surface of the image sensor 3; wherein, the lateral length of the line light source 1 is 3 mm, and the pixel pitch of the image sensor 3 is 5.6 μm.
[0051] The measurement method of lateral...
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