Convex aspheric optical element surface type detection device

Abstract

The invention provides a convex aspheric optical element surface type detection device, relating to an optical element detection device. The convex aspheric optical element surface type detection device is provided with a light source, a reflecting mirror, a receiving mirror, a detection platform, a lifting platform and an analytical processing system, wherein the reflecting mirror is arranged in front of the light beam of the light source, the detection platform is arranged in front of the reflecting mirror, the receiving mirror is arranged in front of an optical element, and the analytic processing system is arranged in front of the receiving mirror; the detection platform is sequentially provided with a vertical moving mechanism, a swinging mechanism and a revolving mechanism from bottom to top; the vertical moving mechanism is provided with a base, a first bearing oil chamber, a lifting rod, a lead screw motor, a connecting plate, a fine tuning wedge block and a limit slot; the swinging mechanism is provided with a third bearing oil chamber, a static pressure thrust bearing, a rotating shaft, a C-shaft operating platform, a swinging platform and a servo motor; and the revolving mechanism is provided with a motor and an A-shaft operation platform. The convex aspheric optical element surface type detection device provided by the invention has a simple structure, no mechanical efficiency loss and high output torque, and high positioning accuracy, high dynamic response and low noise can be realized. The convex aspheric optical element surface type detection device provided by the invention has the characteristics of high bearing capacity, high rotary precision, long service life and small homogenization error.

Description

technical field [0001] The invention relates to a detection device for an optical element, in particular to a surface type detection device for a convex aspherical optical element. Background technique [0002] Aspheric optical components have many advantages in application, especially in recent years, the emergence of new materials and the development of new manufacturing technology have made the aspheric processing technology develop by leaps and bounds. However, the manufacture of aspheric components must be combined with accurate aspheric surface detection technology to obtain qualified aspheric surfaces. Therefore, the detection of aspheric optical components has become the frontier field of optical measurement technology research. [0003] At present, most of the methods for detecting aspheric surfaces are contact and non-contact measurement methods, but there are usually some troubles in non-contact measurement. In non-contact measurement, since the geometric shape ...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the existing detection device cannot ensure that the surface to be measured of the workpiece is perpendicular to the light source when measuring the convex aspheric optical element, and cannot perform comprehensive and accurate measurement of the surface shape of the convex aspheric optical element. Through the A, C, Y three-axis linkage adjustment of the position and attitude of the workpiece, it is guaranteed to be able to detect the surface type detection device of the convex aspheric optical element of the entire convex aspheric surface type

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