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Piezoelectric-gas mixture control type fluid jet device

A gas mixing and fluid jetting technology, applied in liquid jetting devices, jetting devices, etc., can solve the problems of weak bearing capacity, easy to be affected by load, small output force, etc., and achieve the effect of good elasticity

Inactive Publication Date: 2012-07-11
JILIN UNIV
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Problems solved by technology

[0007] The invention provides a piezoelectric-gas mixing control type fluid injection device to solve the problems that the piezoelectric pump is easily affected by the load when the fluid is quantitatively delivered, the output force is small, the precision is low, and the carrying capacity is weak, and the current dispensing technology The problems of poor glue point consistency and complex structure control in the

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  • Piezoelectric-gas mixture control type fluid jet device
  • Piezoelectric-gas mixture control type fluid jet device
  • Piezoelectric-gas mixture control type fluid jet device

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Embodiment Construction

[0020] See figure 1 As shown, a piezoelectric-gas hybrid control type fluid injection device of the present invention includes three unit injection units, a gas control unit and a piezoelectric drive control unit. The injection unit includes a nozzle (1), a needle valve (2), a connecting column (3), a rubber gasket (4), a diaphragm spring (5), a liquid cavity (21), and the gas control unit includes a pneumatic cavity (20) ), a return spring (8), an air valve (9), an air valve seat (19), and the piezoelectric drive control unit includes a piezoelectric stack (11), an adjusting spring sheet (10), and a pretensioning device. The nozzle (1) is in interference fit with the liquid cavity (21) and is equipped with a sealing ring (22), the needle valve (2) is threadedly connected with the connecting column (3), and the connecting column (3) is used with the diaphragm spring (5) The nut (6) is connected with the rubber gasket (4), the piezoelectric stack (11) is connected with the pre-t...

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Abstract

The invention provides a novel piezoelectric-gas mixture control type fluid jet device, which is simple in structure and convenient in maintenance. The technical scheme includes that the piezoelectric-gas mixture control type fluid jet device comprises a jet unit, a gas control unit and a piezoelectric driving control unit, the jet unit comprises a nozzle, a needle valve, a connecting column, a rubber gasket, a diaphragm spring and a liquid cavity, the gas control unit comprises a gas pressure cavity, a return spring, a gas valve and a gas valve seat, and the piezoelectric driving control unit comprises a piezoelectric stack, an adjusting spring sheet and a pre-tightening device. The novel piezoelectric-gas mixture control type fluid jet device can be applied to the fields of precision chemistry, quantitative drug distribution, biomedicine and the like, is particularly applicable to the technical field of high-viscosity fluid dispensing in semiconductor package, and is used for chip fixation in electronic package, surface mount, underfilling, fluorescent powder coating in liquid crystal display panel and the like.

Description

Technical field [0001] The invention relates to a piezoelectric-gas mixing control type fluid jet device, which belongs to the field of microelectronic machinery. Background technique [0002] With the maturity of the microelectronics industry, materials and control technologies, microelectromechanical systems have developed rapidly in recent years. As an important branch of microelectromechanical systems, microfluidic systems have important application prospects in drug micro-delivery, fuel micro-injection, integrated electronic component packaging, cooling, and micro-chemical analysis due to their ability to accurately detect and control flow. [0003] The invention patent "Piezoelectric Stack Pump" (application publication number CN 101216027A) proposes a new type of piezoelectric stack pump with large flow and high output pressure, which is characterized in that the piezoelectric stack pushes the piston under the action of external excitation. The piston drives the metal seali...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05B9/04B05B12/00
Inventor 刘建芳丁宁宁焦晓阳江海沈超
Owner JILIN UNIV
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