Three-window based common-path interference detecting method and device
An interferometric detection, three-window technology, applied in measurement devices, optical radiation measurement, measurement optics, etc., can solve the problems of complex phase recovery algorithm and large detection workload, and achieve compact structure, improved measurement accuracy, and simple mapping relationship. Effect
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[0025] The implementation examples of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0026] The device of the present invention includes: a light source 8, a collimating beam expander system 9, and an object to be measured 1, a rectangular window 2, a first lens 3, a one-dimensional periodic grating 4, a second lens 5 and an image arranged in sequence in the direction of light emission. Sensor 6, and the computer 7 that is connected with image sensor 6, wherein light source 8 is the HeNe laser of wavelength 632.8nm; Rectangular window 2 is the rectangular window of D×D=7.59mm×7.59mm, is positioned at the front focal plane of first lens 3 Above; the object to be measured 1 is located in front of the central window of the rectangular window 2, and its size in the x direction is <D / 3; the one-dimensional periodic grating is a Ronchi grating with a period d=50 μm, located on the back focal plane of the first lens 3 and the s...
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