Heating plate support positioning device

Abstract

The invention relates to a heating plate support positioning device, in particular to a heating plate support positioning device for use in a chemical vapor deposition process. The device comprises a heating plate and a fixed support device, wherein the lower end of the fixed support device is connected with the bottom of a reaction cavity; four corners of the heating plate are beveled edges which are cut; the beveled edges form a 90-degree angle with a diagonal line which passes through the center of the heating plate; units which are fixedly connected with the fixed support device are arranged at the middle positions of two long edges of the heating plate and the four beveled edges; and the upper end of the fixed support device is connected with the heating plate in an adjustable manner. The device has a simple structure, can solve the problems of the supporting and positioning of the heating plate, keep the uniformity of the temperature of the heating plate, prevent heat loss and regulate the level of the heating plate, and is convenient to disassemble and maintain.

Description

technical field [0001] The invention relates to a heating plate supporting and positioning device, in particular to a heating plate supporting and positioning device in a chemical vapor deposition process. Background technique [0002] The future market development of photovoltaic applications, especially for use in grid-connected photovoltaic power plants, depends critically on the potential to reduce the cost of solar cell production. The production process of thin-film solar cells consumes less energy, which has the potential to greatly reduce raw material and manufacturing costs; at the same time, thin-film solar cells can still generate electricity under low light conditions. Therefore, the current market demand for thin-film solar cells is gradually increasing, and the technology of manufacturing thin-film solar cells has become a research hotspot in recent years. [0003] ZnO is an N-type direct bandgap semiconductor material with a bandgap Eg of 3.37eV at room tempe...

AI Technical Summary

Problems solved by technology

The design of a separate positioning device is relatively difficult, adding additional technical difficulties and costs, and it is also not conducive to the disassembly and maintenance of the heating plate

[0012] In addition, this design using screws to support the heating plate does not have the function of adjusting the level of the heating plate, because due to the precision of machining and assembly, it is difficult to maintain the level of the heating plate after it is installed in the process chamber. The glass on the heating plate will not be level, which will lead to uneven spacing between the spray plate and the heating plate, which will seriously affect the uniformity of the BZO film layer. When using screws to support the heating plate, if you want to adjust the level, you can only After lifting the heating plate, manually adjust the screws at the bottom of the chamber to change the height. Generally, at least eight screws are used to support a heating plate

Usually, it is difficult to ensure the level of the heating plate by manually adjusting the screw, and the height difference is within 1mm

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