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Preparation method for pile face black silicon material

A technology of black silicon and suede, applied in the field of solar cells, can solve problems that affect photoelectric conversion efficiency and cannot fully solve the problem of sunlight reflection

Active Publication Date: 2012-04-04
江苏顶洁医疗器械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In China, several research institutions have begun research on the preparation of black silicon materials, but these methods require laser irradiation
[0004] Although the existing technology has made progress in broad-spectrum absorption, it cannot fully solve the problem of sunlight reflection, which seriously affects the photoelectric conversion efficiency.

Method used

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  • Preparation method for pile face black silicon material
  • Preparation method for pile face black silicon material
  • Preparation method for pile face black silicon material

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Embodiment 1

[0030] Preparation method step flow chart of the present invention sees attached figure 1 , a preparation method of suede black silicon material, comprising the following steps:

[0031] S1. Disperse polystyrene pellets in water to form a monolayer polystyrene pellet film on the water surface;

[0032] S2. attaching the single-layer polystyrene pellet film to the silicon wafer by the method of pulling film;

[0033] S3. Reactive ion etching is carried out on the surface of the silicon wafer attached with a single-layer polystyrene spherical film, and the gas used in the reactive ion etching is SF 6 , until the polystyrene balls are completely etched, forming a periodic pointed cone-shaped microstructure on the silicon wafer;

[0034] S4. Carrying out the step of preparing a black silicon layer on the silicon wafer prepared in step S3.

[0035] The technological process schematic diagram when the present invention is concretely implemented is referring to appendix figure 2...

Embodiment 2

[0042] Preparation method step flow chart of the present invention sees attached Figure 8 , a preparation method of suede black silicon material, comprising the following steps:

[0043] A1. Disperse the polystyrene bead particles in water to form a single-layer polystyrene bead film on the water surface;

[0044] A2. the single-layer polystyrene bead film is attached to the silicon wafer by the method of pulling film;

[0045] A3. In order to remove a small amount of moisture on the silicon wafer, the silicon wafer attached with a single-layer polystyrene pellet film can be placed in an oven for drying, and the temperature of the oven is controlled at 50-100°C, preferably 60°C in this embodiment;

[0046] A4. Reactive ion etching is performed on the surface of the silicon wafer with a single-layer polystyrene spherical film attached, and the etching gas for reactive ion etching is SF 6 , stop the reactive ion etching when the single-layer polystyrene ball film is not compl...

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Abstract

The present invention provides a preparation method for a pile face black silicon material, comprising a rough technology step and a next black silicon layer preparation step, wherein the rough technology step comprises: dispersing polystyrene particle beads in the water to form a single layer bead membrane on the water surface; attaching the single layer bead membrane onto a silicon chip by the film salvaging method; implementing the reactive ion etch on the surface of the silicon chip attached with the single layer polystyrene bead membrane to form a periodic microstructure on the silicon chip. Based on the preparation method of the invention, the black silicon material of the pile face structure can be obtained on the silicon substrate, and can be wildly used in the preparation of a solar cell or photoelectric elements.

Description

【Technical field】 [0001] The invention relates to the field of solar cells, in particular to a preparation technology for black silicon materials used in solar cells. 【Background technique】 [0002] Energy resources such as coal, oil, and natural gas, which are the main energy sources, are constantly being consumed, and the energy situation is not optimistic. As a renewable and clean energy source, solar cells have received great attention in many countries. Silicon-based solar cells occupy 90% of the market, but the cost of crystalline silicon is too high, and the efficiency of amorphous silicon is too low. Black silicon solar cells have broad-spectrum absorption properties, so they have great application prospects for solar cells. [0003] Black silicon material was discovered in the process of reactive ion etching, but it did not cause enough awareness at that time. The black silicon material is a silicon material with a quasi-ordered crystal microstructure formed on t...

Claims

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Application Information

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IPC IPC(8): C30B33/12
Inventor 刘若鹏赵治亚缪锡根张贤高
Owner 江苏顶洁医疗器械有限公司
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