Device and method for generating large-area, uniform and non-magnetized plasmas
A plasma and generation method technology, applied in the field of plasma, can solve problems such as difficult control of plasma electron density and distribution, high-temperature ablation of antennas, and experimental errors in electromagnetic wave transmission.
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[0037] See attached figure 1 , a large-area uniform non-magnetized plasma generating device at least includes a plasma generating chamber 1 , a vacuum device 2 and a plasma power source 3 . The plasma generation chamber 1 includes a cylindrical cavity and a mesh discharge electrode 101. The mesh discharge electrode 101 is a hollow circular mesh body whose outer diameter is smaller than the inner diameter of the cylindrical cavity. The mesh discharge electrode 101 and the The cylindrical cavity is connected as a concentric circle structure, and the observation window 105 and the loose-leaf window 106 are connected and fixed at both ends of the cylindrical cavity.
[0038] The plasma generating chamber 1 has a gas delivery hole 102, an exhaust hole 103 and an electrode through hole 104. The gas delivery hole 102 is connected to the gas tank 202 of the vacuum device 2 through a pipeline, and there is a gas delivery hole between the gas delivery hole 102 and the gas tank 202. The...
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