High-temperature high-vacuum temperature measuring device

Abstract

The invention discloses a high-temperature high-vacuum temperature measuring device which is used for measuring the temperature of a detection point in a cavity of equipment in a high-temperature high-vacuum state. The high-temperature high-vacuum measuring device comprises an infrared temperature measuring instrument, temperature measuring glass and a cold filtering device, wherein the temperature measuring glass is arranged between the cavity and the infrared temperature measuring instrument; the cold filtering device is arranged between the temperature measuring glass and the cavity; the temperature of the cold filtering device is lower than that of the cavity; and the space of the surface of the temperature measuring glass is communicated with the cavity through an inner passage of the cold filtering device. A volatile substance generated by an object inside the equipment to be measured can reach the surface of the temperature measuring glass only through the cold filtering device and is quickly converted from a gaseous state to a solid state and adsorbed onto the cold filtering device after contacting the inner passage of the cold filtering device, and thus the number of molecules or atoms of the volatile substance which contacts the surface of the temperature measuring glass are obviously reduced; the accuracy of the temperature measurement value is improved; the temperature of the equipment can be continuously measured; and a system can acquire, analyze and process temperature data in real time and can effectively control the running process of the equipment.

Description

technical field [0001] The invention relates to the technical field of equipment temperature measurement, in particular to a high temperature and high vacuum temperature measuring device. Background technique [0002] The temperature measurement technology of equipment operating under high temperature and high vacuum is currently divided into contact temperature measurement and non-contact temperature measurement. Non-contact temperature measurement is divided into many types, and the infrared temperature measurement has a fast response time, The advantages of safe use and long service life are widely used. [0003] Molecules inside any object whose temperature is higher than absolute zero are constantly moving, and this molecular motion will cause the object to continuously emit infrared radiation energy to the surrounding space, thus forming a certain temperature field on the surface of the object. If the infrared radiation energy emitted by the object to the surrounding ...

AI Technical Summary

Problems solved by technology

[0005] In the existing technology, adding a switching valve device to the temperature measuring device can effectively slow down the deposition rate of volatiles inside the equipment on the temperature measuring glass, but since the valve is closed most of the time, the temperature measurement process cannot be continuous. Therefore, the temperature data cannot be collected, analyzed and processed in real time, and the system cannot be effectively controlled.

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