Water-cooled temperature measurer for high-temperature, high-vacuum and high-volatile matters
A temperature measuring device and high vacuum technology, which is applied in the direction of measuring device, radiation pyrometry, optical radiation measurement, etc., can solve the problem of accelerated deposition of volatiles, inability to effectively control the system, and influence on the accuracy of the measurement data of the thermometer, etc. problem, to achieve the effect of improving accuracy and reducing the number of molecules or atoms
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[0019] see figure 1 , The present invention provides a high-temperature, high-vacuum, high-volatiles water-cooled measuring device for measuring the temperature of a cavity of a device in a state of high-temperature, high-vacuum, and high-volatiles.
[0020] The device includes an infrared thermometer 10, a temperature measuring glass 7, a cold filter decontamination device 5 and a water-cooled switch valve 3, the temperature measurement glass 7 is installed between the cavity 1 and the infrared thermometer 10, and the cold filter decontamination device 5 is set between the temperature measuring glass 7 and the water-cooled switch valve 3, and the water-cooled switch valve 3 is set between the cavity 1 and the cold filter and decontamination device 5, and the temperature of the cold filter and decontamination device 5 and the water-cooled switch valve 3 is lower than that of the cavity The temperature of the body 1, the surface space of the temperature measuring glass 7 commun...
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